DOI QR코드

DOI QR Code

Properties of TCO Fabricated with Annealing Temperature of Al Doped ZnO Film for Solar Cell Application

Al Doped ZnO 박막의 열처리에 따른 태양전지용 투명전도막 특성

  • Kim, Bong-Seok (Department of Information and Communication, Sungkyunkwan University) ;
  • Kim, Eung-Kwon (Department of Information and Communication, Sungkyunkwan University) ;
  • Kim, Young-Sung (Advanced Material Process of Information Technology, Sungkyunkwan University)
  • 김봉석 (성균관대학교 전자전기 및 컴퓨터공학과) ;
  • 김응권 (성균관대학교 전자전기 및 컴퓨터공학과) ;
  • 김용성 (성균관대학교 정보통신용 신기능성 소재 및 공정연구센터)
  • Published : 2006.09.01

Abstract

The annealing temperature effect of transparent conducting oxide film grown on glass substrate for solar cell application was studied in this paper. Using pulsed DC magnetron sputtering with 1 at% Al-doped ZnO target, TCO films were deposited on coming 7059 glass at room temperature. Al:ZnO thin films were annealed at 200, 400, Al $600^{\circ}C$ for 10 min and annealing resulted in lower biaxial compressive stress of about 1GPa and increased average crystallite size in all films. The as-grown film shows the resistivity of $1{\times}10^{-2}{\Omega}{\cdot}cm$ and transmittance under 80%, whereas the electrical and optical properties of film annealed at $400^{\circ}C$ are enhanced up to $5{\times}10^{-4}{\Omega}{\cdot}cm$ and 85%, respectively.

References

  1. J. Han, P. Q. Mantas, and A. M. R. Senos, 'Effect of Al and Mn Doping on the Electrical Conductivity of ZnO,' J. Eur. Ceram. Soc., 21 [10-11] 1883-86 (2001) https://doi.org/10.1016/S0955-2219(01)00136-4
  2. S. Fujihara, C. Sasaki, and T. Kimura, 'Effects of Li and Mg Doping on Microstructure and Properties of Sol-Gel ZnO Thin Films,' J. Eur. Ceram. Soc., 21 2109-12 (2001) https://doi.org/10.1016/S0955-2219(01)00182-0
  3. H. Ko, W.-P. Tai, K.-C. Kim, S.-H. Kim, S.-J. Suh, and Y.- S. Kim, 'Growth of Al-Doped ZnO Thin Films by Pulsed DC Magnetron Sputtering,' J. Crystal Growth, 277 [1/4] 352-58 (2005) https://doi.org/10.1016/j.jcrysgro.2005.01.061
  4. X. H. Li, A. P. Huang, M. K. Zhu, S. L. Xu, J. Chen, H. Wanh, B. Wang, and H. Yan, 'Influence of Substrate Temperature on the Orientation and Optical Properties of Sputtered ZnO Films,' Mater. Lett., 57 4655-59 (2003) https://doi.org/10.1016/S0167-577X(03)00379-3
  5. M. Chen, Z. L. Pei, X. Wang, C. Sun, and L. S. Wen, 'Structural, Electrical, and Optical Properties of Transparent Conductive Oxide ZnO:Al Films Prepared by DC Magnetron Reactive Sputtering,' J. Vac. Sci. Technol. A, 19 [3] 963-70 (2001) https://doi.org/10.1116/1.1368836
  6. M. K. Puchert, P. Y. Timbrell, and R. N. Lamb, 'Postdeposition Annealing of Radio Frequency Magnetron Sputtered ZnO Films,' J. Vac. Sci. Technol. A, 14 [4] 2220-30 (1996) https://doi.org/10.1116/1.580050
  7. S. Takada, 'Relation between Optical Property and Crystallinity of ZnO Thin Films Prepared by RF Magnetron Sputtering,' J. Appl. Phys., 73 [10] 4739-42 (1993) https://doi.org/10.1063/1.354091
  8. Z. B. Fang, Z. J. Yan, Y. S. Tan, X. Q. Liu, and Y. Y. Wang, 'Influence of Post-Annealing Treatment on the Structure Properties of ZnO Films,' Appl. Surf. Sci., 241 [3/4] 303-08 (2005) https://doi.org/10.1016/j.apsusc.2004.07.056
  9. B. D. Cullity and S. R. Stock, 'Elements of X-Ray Diffraction,' pp. 123-31, Prentice Hall, 2001
  10. X. Zi-Qiang, D. Hong, L. Yan, and C. Hang, 'Al-Doped Effects on Structure, Electrical, and Optical Properties of c- Axis-Orientated ZnO; Al Thin Films,' Materials Science in Semiconductor Processing, 9 [1-3] 132-35 (2006) https://doi.org/10.1016/j.mssp.2006.01.082
  11. S. Takada, 'Relation between Optical Properties and Crystallinity of ZnO Thin Films Prepared by RF Magnetron Sputtering,' J. Appl. Phys., 73 [10] 4739-42 (1993) https://doi.org/10.1063/1.354091

Cited by

  1. Design of LED Driving Circuit using Voltage Controlled Ring Oscillator and Lighting Controller vol.24, pp.4, 2010, https://doi.org/10.5207/JIEIE.2010.24.4.001
  2. Electrical and Optical Properties of the GZO Transparent Conducting Layer Prepared by Magnetron Sputtering Technique vol.24, pp.4, 2010, https://doi.org/10.5207/JIEIE.2010.24.4.110
  3. Experimental Study on Fabrication of AZO Transparent Electrode for Organic Solar Cell Using Selective Low-Temperature Atomic Layer Deposition vol.37, pp.6, 2013, https://doi.org/10.3795/KSME-B.2013.37.6.577
  4. Influence of Post-deposition Annealing Temperature on the Properties of GZO/Al Thin Film vol.47, pp.2, 2014, https://doi.org/10.5695/JKISE.2014.47.2.081
  5. The Characteristics of Multilayer Thin Films Deposited with Metal Thin Films (Ag, Al, Cu) vol.97-101, pp.1662-8985, 2010, https://doi.org/10.4028/www.scientific.net/AMR.97-101.1768
  6. A Study on the Physical Properties of AZO Films as Variation of Sputtering Conditions vol.287-290, pp.1662-8985, 2011, https://doi.org/10.4028/www.scientific.net/AMR.287-290.54