Development of 3D Micro-Nano Hybrid Patterns Using Anodized Aluminum and Micro-Indentation

양극산화된 알루미늄과 마이크로 인덴데이션을 이용한 3차원 마이크로-나노 하이브리드 패턴 제작

  • 권종태 (강원대학교 기계.메카트로닉스공학부) ;
  • 신홍규 (강원대학교 기계.메카트로닉스공학부) ;
  • 김병희 (강원대학교 기계.메카트로닉스공학부) ;
  • 서영호 (강원대학교 기계.메카트로닉스공학부)
  • Published : 2007.12.01


A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.


Anodized Aluminum;Hemispherical Nano-Pattern;Micro-Indentation;Micro-Nano Hybrid Pattern


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