Structural Characteristic Analysis of an Ultra-Precision Machine for Machining Large-Surface Micro-Features

초정밀 대면적 미세 형상 가공기의 구조 특성 해석

  • 김석일 (한국항공대학교 항공우주 및 기계공학부) ;
  • 이원재 (한국항공대학교 대학원 항공우주 및 기계공학부)
  • Published : 2007.12.01


In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.


  1. Kovacs, G. T. A, Maluf N. L and Petersen, K.. E., 1998, 'Bulk Micromachining of Silicon,' Proceedings of the IEEE, Vol. 86, No.8, pp. 1536-1551
  2. Park, S. S.,Hong, S. J., Jung, S. W., Cho, J. W. and Cho, N. K.., 2000, 'The Present State and Prospect of LIGA Technology,' Journal of the KSPE, Vol. 17, No. 7, pp. 36-44
  3. Kathuria, Y. P., 2004, 'L3: Laser, LIGA and Lithography in Microstructming*,' Journal of the Indian Institute of Science, Vol. 84,pp. 77-87
  4. Park, C. H. and Song, C. K., 2005, 'Ultra Precision Machine Tools for Machining the Large Surface Micro Feature,' Journal of the KSPE, Vol. 22, No. 5, pp. 7-15
  5. Inaba, S., 2001, 'Achievements of the Micro-machine Project and the FANUC ROBOnano Ui Machine,' Macromachine, No. 37, p. 9
  6. Knights, M., 2002, 'Micro Molds Make Micro Parts,' Plastics Technology,
  7. Park, C. H. et al., 2006, 'Core Technology Development for Ultra Precision and Intelligent Machining to Generate Micro Features on Large Surfaces (II),' Annual Report of Korea's Ministry of Commerce, Industry and Energy
  8. Kim, S. I., Park, C. H. and Cho, S. J., 2004, 'Structural Characteristic Analysis on the Hydrostatic Guide Way and Feeding System of a High-Precision Centerless Grinder for Machining Ferrules,' Trans. of KSME (A), Vol. 28, No.7, pp. 896-899