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Structural Characteristic Analysis of an Ultra-Precision Machine for Machining Large-Surface Micro-Features

초정밀 대면적 미세 형상 가공기의 구조 특성 해석

  • 김석일 (한국항공대학교 항공우주 및 기계공학부) ;
  • 이원재 (한국항공대학교 대학원 항공우주 및 기계공학부)
  • Published : 2007.12.01

Abstract

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

Keywords

Ultra-Precision Machine;Large-Surface;Micro-Feature;Linear Motor;Hydrostatic Guideway;Hydrostatic Bearing;Structural Characteristic Analysis;Loop Stiffness

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