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Fabrication of Copper Micromesh Sheets Using PDMS Flexible Mold

PDMS 유연 몰드를 이용한 구리 마이크로 메쉬 시트의 제작

  • 정순녕 (부산대학교 기계공학부) ;
  • 강창근 (부산대학교 기계공학부) ;
  • 정임덕 (부산대학교 미세기계전자시스템) ;
  • 배공명 (부산대학교 기계공학부) ;
  • 박치열 (부산대학교 기계공학부) ;
  • 정필구 (부산대학교 기계공학부) ;
  • 고종수 (부산대학교 기계공학부)
  • Published : 2007.12.01

Abstract

A unique fabrication method for a copper micromesh is proposed and demonstrated. A PDMS mold was fabricated using a microcasting process and then used as a flexible mold in copper electroplating. The fabricated copper micromesh was well formed and connected without any cracks within the entire mold area. The experimental results verified that the fabricated features of the copper micromesh accurately followed the shape of the microstructures of the PDMS mold. This unique fabrication method provides an easy yet precise means of producing three-dimensional metal microstructures.

Keywords

Flexible Mold;PDMS;Electroforming;Polymer Replication;Micromesh;Microcasting

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