Fabrication of Micro-channels for Wave-Micropump Using Stereolithography and UV Photolithography

광조형법과 UV 포토리소그래피를 이용한 웨이브 마이크로펌프 미세 채널 제작

  • 노병국 (한성대학교 기계시스템공하고가) ;
  • 김우식 (원광대학교 나노공학과 대학원) ;
  • 심광보 (한양대학교 신소재공학부)
  • Published : 2007.12.01


Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.


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