Fabrication of Micro-channels for Wave-Micropump Using Stereolithography and UV Photolithography

광조형법과 UV 포토리소그래피를 이용한 웨이브 마이크로펌프 미세 채널 제작

  • 노병국 (한성대학교 기계시스템공하고가) ;
  • 김우식 (원광대학교 나노공학과 대학원) ;
  • 심광보 (한양대학교 신소재공학부)
  • Published : 2007.12.01

Abstract

Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

References

  1. Geschke, O., Klank, H. and Tellemann, P., 'Microsystem Engineering of Lab-on-a-Chip Devices,' Wiley-VCH, pp. 39-76, 2004
  2. Madou, J., 'Fundamentals of MicroFabrication,' CRC Press, pp. 1-14, 2002
  3. Chua, C. K., Leong, K. F. and Lim, C. S., 'Rapid Prototyping,' World Scientific, pp. 35-40, 2004
  4. Lee, Y. T., 'Fabrication of the liquid analyzer using micro-stereolithography technology,' Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol. 14, No. 12, pp. 994-1000, 2001
  5. Francis, E. H., 'Microfluidics and BioMems Applications,' Kluwer Academic Publishers, pp. 3-22, 2002
  6. Moroney, R. M., White, R. M. and Howe, R. T., 'Ultrasonically Induced Microtransport,' Proceedings of 1991 IEEE Micro-Electro Mechanical Systems, pp. 277-282, 1991
  7. Nguyen, N. T. and White, R. M., 'Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation,' Sensors and Actuators, Vol. 77, No. 3, pp. 229-236, 1999 https://doi.org/10.1016/S0924-4247(99)00216-2
  8. Ikuta, K., Maruo, S. and Kojima, S., 'New micro stereo lithography for freely movable 3D micro structure,' Proceedings of the IEEE Micro electro mechanical Systems, pp. 290-295, 1998
  9. Gardeniers, J. G. E., Berenschot, J. W., Boer, M. J., Yeshurun, Y. and Hefetz, M., 'Silicon micromachined hollow microneedles for transdermal liquid transfer,' Proceedings of the IEEE Micro electro mechanical Systems, pp. 141-144, 2002
  10. Tabata, O., Matsuzuka, N., Yamaji, T., Uemura, S. and Yamamoto, K., '3D fabrication by moving mask deep X-ray lithography with multiple stage,' Proceedings of the IEEE Micro electro mechanical Systems, pp. 180-183, 2002
  11. Ehrfeld, W. and Schmidt, A., 'Recent developments in deep X-ray lithography,' J. Vac. Sci. Technol. B, Vol. 16, No. 6, pp. 3526-3534, 1998 https://doi.org/10.1116/1.590490
  12. Beret, C., Racine, G. A., Gobet, J., Luthier, R. and De Rooij, N. F., 'Micro fabrication of 3D multidirectional inclined structure by UV lithography and electroplating,' Proceedings of the IEEE Micro electro mechanical Systems, pp. 81-85, 1994
  13. http://www.microchem.com, 'SU-8 Photoresist Product Line,' 2007