Axiomatic Design of a Micromanipulator using Displacement Amplifier

변위증폭기를 이용한 마이크로 매니플레이터의 공리적 설계

  • 한석영 (한양대학교 기계공학부) ;
  • 윤상준 (한양대학교 대학원 기계공학과) ;
  • 황준성 (한양대학교 대학원 기계공학과) ;
  • 김민수 (한양대학교 대학원 기계공학과) ;
  • 박재용 (한양대학교 대학원 기계공학과) ;
  • 이병주 (한양대학교 전자컴퓨터공학부) ;
  • 김선정 (한양대학교 전기제어생체공학부)
  • Published : 2007.01.01


Micromanipulator is a device that manipulates an object with high precision. Generally, a parallel-type robot has inherently higher precision than a serial-type robot. In most cases, the use of flexure hinge mechanisms is the most appropriate approach to micromanipulators. The micromanipulator is basically required that have high natural frequency and sufficient workspace. However, previous designs are hard to satisfy the required workspace and natural frequency, simultaneously, because the previous micromanipulators are coupled designs. Therefore, this paper suggests a new design parameter as displacement amplifier and new design procedure based on semi-coupled design in axiomatic design. As a consequence the spatial 3-DOF micromanipulator which is chosen as an exemplary device has natural frequency of 500Hz and workspace of $-0.5^{\circ}{\sim}0.5^{\circ}$. To investigate the effectiveness of the displacement amplifier, simulation and experiment are performed.


Axiomatic Design;Workspace;Natural Frequency;Displacement Amplifier;Micromanipulator


  1. Freeman, R. A. and Tesar, D., 1988, 'Dynamic Modeling of Serial and Parallel Mechanisms/Robotics Systems, Part I-Methodology, Part II-Applications,' Proc. of 20th ASME Mechanisms Conference, Orlando. FL. DE-Vol. 15, No 3, pp. 7-27
  2. Gao, P., Swei, S. M. and Yuan, Z., 1999, 'A New Piezodriven Precision Micropositioning Stage Utilizing Flexure Hinges,' Nano-technology, Vol. 10, pp. 394-398
  3. Chung, G. B., Yi, B. J., Suh, I. H., Kim, W. K. and Chung, W. K., 2001, 'Design and Analysis of a Spatial 3-DOF Micro Manipulator for Teleoperation,' Intelligent Robots and Systems, Proc. IEEE International Conference on Intelligent Robots and Systems, Maui, pp. 337-342
  4. Suh, N. P., 2001, Axiomatic Design, Oxford University Press, New York
  5. Bae, S. W., 2001, 'Axiomatic Design of Independent Automotive Suspension Systems,' Ph.D.'s thesis, School of Mechanical and Aerospace Engineering, Seoul National University
  6. Kim, J. O., 2003, 'Optimization of a Ultra-Precision Positioning Manipulator Using Axiomatic Design' Master' thesis, Department of Automotive Engineering, Hanyang University
  7. Ryu, J. W., 1997, '6-Axis Ultra Precision Positioning Mechanism Design and Positioning Control,' Ph. D. dissertation, Department of Mechanical Engineering, KAIST
  8. Yi, B. J., Chung, G. B., Kim. W. K. and Suh. I. H., 2003, 'Design and Experiment of a 3-DOF Parallel Micromechanism Utilizing Flexure Hinges,' IEEE Transaction on Robotics and Automaion, Vol. 19, No. 4, pp. 604-612