Improvement of the Carbon Nanotube Tip by Focused Ion Beam and it Performance Evaluation

탄소나노튜브 팁의 집속이온빔에 의한 개선 및 성능 평가

  • 한창수 (한국기계연구원 나노공정장비센터) ;
  • 신영현 (한국기계연구원 나노공정장비센터) ;
  • 윤여환 (한국기계연구원 나노공정장비센터) ;
  • 이응숙 (한구기계연구원 나노공정장비센터)
  • Published : 2007.01.01


This paper presents development of carbon nanotube (CNT) tip modified by focused ion beam (FIB) and experimental results in non-contact mode of atomic force microscopy (AFM) using fabricated tip. We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a conventional silicon tip. The morphology of the fabricated CNT tip was then modified into a desired shape using focused ion beam. We measured anodic aluminum oxide sample and trench structure to estimate the performance of FIB-modified tip and compared with those of conventional Si tip. We demonstrate that FIB modified tip in non contact mode had superior characteristics than conventional tip in the respects of wear, image resolution and sidewall measurement.


Carbon Nanotube;Atomic Force Microscopy;Focused Ion Beam;Dielectrophoresis


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