Properties of Carbon Films Formed for Renewed Electric Power Energy by Electro-deposition

신 재생 에너지 활용을 위한 Carbon 박막의 특성

  • 이상헌 (선문대학교 전자정보통신공학부)
  • Published : 2007.01.01

Abstract

Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.

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References

  1. F.Rossi, B.Andre, A.van Veen, P.E.Mijnarends, H.Schut, M.P.Delphillcke, W.Gissler, J.Haupt, G.Lucazeau, and L.Abello, J. Appl. Phys., 75, 3121 (1994) https://doi.org/10.1063/1.356425
  2. L.L.Maissel, and R.Glang, Hand book of Thin Film Technology (McGrow-Hill, New York) Chap.5, 5 (1970)
  3. B. Pate, Electronic Properties and Applications, eds. L.S. Pan and D.R.Kania (Kluwer Academic, Boston) Chap. 2, (1995)
  4. T.Suzuki, Y.Manita, T.Yamazaki, S.Wada, and T.Noma, J.Mater.Sci., 30, 2007 (1995) https://doi.org/10.1007/BF01178435
  5. A.AVoevodin, S.].P.Laube, S.D.Walck, ].S.Solomon, M.S.Donley, and J.S.zabinski, J.Appl.Phys., 78, 4123 (1995)