# 박막시험편용 고온 크리프 시험기의 설계 및 제작

• 고경득 (전남대학교 대학원 기계공학과) ;
• 이상신 ((주)POSCO 광양제철소) ;
• 강기주 (전남대학교 기계시스템 공학부)
• Published : 2007.02.01
• 82 8

#### Abstract

A new material tester has been developed to measure mechanical properties of thin film specimens at high temperature. It is useful for observing oxide film growth or local deformation on the surface, and for measuring creep strength. Main characteristics of the tester is as follows; First, high temperature is achieved by Joule heating generated by electricity passing through the specimen, which does not need to enclose the specimen by a furnace or a heating chamber. The exposed specimen enables one to observe the surface during the test. Because the overall size of the test rig is compact, the whole test rig can be placed in a chamber for environmental controlled tests. The loading device is from a level scales. Not only static load with fixed counter weight, but also variable load by moving counter weight controlled remotely can be applied for an ordinary creep test and creep-fatigue test, respectively. The detail of the construction, operation principle, and the specification are described. And also, an example of test result obtained using the creep tester is presented.

#### Keywords

Thin Film;Joule Heating;Infrared Rays Thermometer;Emissivity;Laser Reflection Interferometer

#### References

1. Vinci, R. P., and Baker, S. P., 2002, 'Mechanical Properties in Small Dimensions,' MBS Bulletin, pp. 12-51
2. Kim, Y. M., 1997, 'Elastic Modulus Measurement of Thin Film Using a Dynamic Method,' J. Electronic Materials, Vol. 26, pp. 1002-1008 https://doi.org/10.1007/s11664-997-0237-y
3. Evans, A. G., Mumm, D. R., Hutchison, J. W., Meier, G. H., and Pettit, F. S., 2001, 'Mecphanisms Controlling the Durability of Thermal Barrier Coatings,' Progress in Material Science, Vol. 46, pp. 505-553 https://doi.org/10.1016/S0079-6425(00)00020-7
4. Clarke, D. R., Pompe, W., 1999, 'Critical Radius for Interface Separation of a Compressively Stressed Film form a Rough Surface,' Acta Materialia, Vol. 47, pp. 1749-1756 https://doi.org/10.1016/S1359-6454(99)00078-6
5. Tolpygo, V. K., Dryden, J. R. and Clarke, D. R., 2000, 'Determination of the Growth Stress and Strain in $\alpha$-$Al_2O_3$ Scales During the Oxidation of Fe-22Cr-4.8Al-0.3Y Alloy,' Acta Materialia, 46, pp. 923-937
6. Lee, S. S., Sun, S. K., Kang, K. J., 2005, 'In-situ Measurement of the Thickness of Aluminum Oxide Scales at High Temperature,' Oxidation of Metals, Vol 63, pp. 73-85 https://doi.org/10.1007/s11085-005-1952-5
7. Lim, S. C., Kang, K. J., 2002, 'Method for Measuring Mechanical Behaviors of Thin Films at High Temperature,' Proceeding of the Korean Welding Society Autumn Annual Meeting, Vol. 38, pp. 225-228
8. Sutton, M. A., chae, T. L., Turner, T. J., & Bruck, N. A., 1990, ' Developement of a Computer Vision Methodology for the Analysis of Surface Deformations in Magnified Images,' ASTM STM 1094, pp. 109-132
9. Karlsson, A. M., Levi, C. G., Evans, A. G., 2002, 'A Model Study of Displacement Instabilities During Cyclic Oxidation,' Acta Materialia, Vol. 50, pp. 1263-1273 https://doi.org/10.1016/S1359-6454(01)00403-7
10. Lim, S. C., Joo, J. H. and Kang, K. J., 2003, 'ethod for Measuring Mechanical Behaviors of Thin Films at High Temperature,' Transactions of the Korea Society of Mechanical Engineers A, Vol. 27, No.1, pp. 102-108,(in Korean) https://doi.org/10.3795/KSME-A.2003.27.1.102