A Numerical Approach to Indentation Techniques for Thin-film Property Evaluation

박막 물성평가 압입시험의 수치접근법

  • 이진행 (서강대학교 대학원 기계공학과) ;
  • 유한석 (서강대학교 대학원 기계공학과) ;
  • 이형일 (서강대학교 기계공학과)
  • Published : 2007.03.01


In this work, the prior indentation theory for a bulk material is extended to an indentation theory for evaluation of thin-film material properties. We first select the optimal data acquisition location, where the strain gradient is the least and the effect of friction is negligible. A new numerical approach to the thin-film indentation technique is then proposed by examining the finite element solutions at the optimal point. With this new approach, from the load-depth curve, we obtain the values of Young's modulus, yield strength, strain-hardening exponent. The average errors of those values are less than 3, 5, 8% respectively.


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