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Development of the Nanofluidic Filter and Nanopore Micromixer Using Self-Assembly of Nano-Spheres and Surface Tension

나노구체의 자기조립 성질과 표면장력을 이용한 나노유체필터 및 나노포어 마이크로믹서

  • 서영호 (강원대학교 기계.메카트로닉스공학부) ;
  • 최두선 (한국기계연구원 나노공정장비연구센터)
  • Published : 2007.09.01

Abstract

We present a simple and an inexpensive method for the fabrication of a nano-fluidic filter and a nano-pore micromixer using self-assembly of nano-spheres and surface tension. Colloid-plug was formed by surface tension of liquid in a microchannel to fabricate nanofluidic filter. When colloid is evaporated, nano-spheres in a colloid are orderly stacked by a capillary force. Orderly stacked nano-spheres form 3-D nano-mesh which can be used as a mesh structure of a fluidic filter. We used silica nano-sphere whose diameter is $567{\pm}85nm$, and silicon micro-channel of $50{\mu}m$-diameter. Fabricated nano-fluidic filter in a micro-channel has median pore diameter of 158nm which was in agreement with expected diameter of the nano-pore of $128{\pm}19nm$. A nano-pore micromixer consists of $200\;{\mu}m-wide,\;100\;{\mu}m-deep$ micro-channel and self-assembled nano-spheres. In the nano-pore micromixer, two different fluids had no sooner met together than two fluids begin to mix at wide region. From the experimental study, we completely apply self-assembly of nano-spheres to nano-fluidic devices.

Keywords

Nanfluidic Device;Nanopore Microxier;Self-assembly;Nanosphere

References

  1. Ajmera, S.K., Delattre, C., Schmidt, M.A. and Jensen, K.F., 2002, 'Microfabricated Cross-Flow Reactor for Catalyst Testing,' Sensors and Actuators, B82, pp. 297-306
  2. Yoon, Y.-K., Park, J.H., Cros, F. and Allen, M.G., 2003, 'Integrated Vertical Screen Microfilter System Using Inclined SU-8 Structure,' IEEE MEMS Conference, Kyoto, Japan, pp. 227-230
  3. Ha, C.S. and Lee, H.W., 2000, Nanoporous Polymer, Korea Chemical Society Polymer Series 3, MUNUNDANG
  4. Xia, Y., Gates, B., Yin, Y. and Lu, Y., 'Monodispersed Colloidal Spheres: Old Materials with New pplications,' Advanced Materials, 12, No. 10 pp. 693-713 https://doi.org/10.1002/(SICI)1521-4095(200005)12:10<693::AID-ADMA693>3.0.CO;2-J
  5. Joannopoulos, J.D., 2001, 'Self-assembly Lights Up,' Nature, Vol. 414, pp. 257-258 https://doi.org/10.1038/35104718
  6. Denkov, N.D., Velev, O.D., Kralchevsky, P.A., Ivanov, I.B., Yoshimura, H. and Nagayama, K., 1993, 'Two-dimensional Crystallization,' Nature 361, 26 https://doi.org/10.1038/361026a0
  7. Sato, H., Kakinuma, T., Go, J.S. and Shoji, S., 2004, 'In-Channel 3-D Micromesh Structures Using Maskless Multi-Angle Exposures and Their Microfilter Application,' Sensors and Actuators A: Physical, Vol. 111, pp. 87-92 https://doi.org/10.1016/j.sna.2003.10.009
  8. Braun, P.V. and Wiltzius, P., 2002, 'Macroporous Materials-Electrochemically Grown Photonic Crystal,' Current Opinion in Colloid & Interface Science, 7 pp. 116-123 https://doi.org/10.1016/S1359-0294(02)00009-2