실험계획법을 이용한 세슘보조 스퍼터링 공정의 특성분석

DOI QR코드

DOI QR Code

민철홍;박성진;윤능구;김태선
Min, Chul-Hong;Park, Sung-Jin;Yoon, Neung-Goo;Kim, Tae-Seon

  • 발행 : 2007.08.31

초록

Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics between process input factors and equipment responses. Therefore, to maximize film quality, optimization of manufacturing process is essential and process characterization is the first step for process optimization. For this, we designed 2 level design of experiment (DOE) to analyze ITO film characteristics including film thickness, resistivity and transmittance. DC power, pressure, carrier flow, Cs temperature and substrate temperature were selected for process input variables. Through statistical effect analysis methods, relation between three types of ITO film characteristics and five kinds of process inputs are successfully characterized and eventually, it can be used to optimize Cs assisted sputtering processes for various types of film deposition.

키워드

Design of Experiment[DOE];Cesium assisted sputtering;Indium tin oxide[ITO];Statistical analysis

참고문헌

  1. C. C. Lee, J. C. Ho, T. S. Hu, Y. W. Wang, Printing Organic Thin-film Transistor Technology, IEEE VLSI-TSA International Symposium, (2005) 49-52
  2. J. Jang, Displays Develop a New Flexibility, Materials Today, 9 (2006) 46-52
  3. Y. S. Choi, J. W. Song, 유기절연재료 ; 유기박막의 전기적 특성 연구, 19(10) (2006) 953-959 https://doi.org/10.4313/JKEM.2006.19.10.953
  4. L. Ke, R. S. Kumar, P. Chen, L. Shen, S. J. Chua, A. P. Burden, Au-ITO Anode for Efficient Polymer Light-emitting Device Operation, Photonics Technology Letters, IEEE, 17(3) (2005) 543-545 https://doi.org/10.1109/LPT.2004.841031
  5. K. Yamada, K. Tamano, T. Mori, T. Mizutani, M. Sugiyama, Organic Light-emitting Diodes Using Semi-transparentAnode for Flexible Display, Properties and Applications of Dielectric Materials, 1 (2003) 49-52
  6. D. R. Cairns, G. P. Crawford, Electromechanical Properties of Transparent Conducting Substrates for Flexible Electronic Displays, Proceedings of the IEEE, 93(8) (2005) 1451-1458
  7. 이승훈, Minitab을 이용한 공학통계 자료분석, 이레테크, (2006) 557-622