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Color Filter Based on a Sub-Wavelength Patterned Poly-Silicon Grating Fabricated using Laser Interference Lithography

광파장 이하의 주기를 갖는 다결정 실리콘 격자 기반의 컬러필터

  • Yoon, Yeo-Taek (Department of Electronic Engineering, Kwangwoon University) ;
  • Lee, Hong-Shik (Department of Electronic Engineering, Kwangwoon University) ;
  • Lee, Sang-Shin (Department of Electronic Engineering, Kwangwoon University) ;
  • Kim, Sang-Hoon (Devices and Materials Lab., LG Electronics Institute of Technology) ;
  • Park, Joo-Do (Devices and Materials Lab., LG Electronics Institute of Technology) ;
  • Lee, Ki-Dong (Devices and Materials Lab., LG Electronics Institute of Technology)
  • 윤여택 (광운대학교 전자공학과) ;
  • 이홍식 (광운대학교 전자공학과) ;
  • 이상신 (광운대학교 전자공학과) ;
  • 김상훈 (엘지전자기술원 소자재료연구소) ;
  • 박주도 (엘지전자기술원 소자재료연구소) ;
  • 이기동 (엘지전자기술원 소자재료연구소)
  • Published : 2008.02.29

Abstract

A color filter was proposed and demonstrated by incorporating a subwavelength patterned 1-dimensional grating in poly silicon. It was produced by employing the laser interference lithography method, providing much wider effective area compared to the conventional e-beam lithography. A $SiO_2$ layer was introduced on top of the silicon grating layer as a mask for the etching of the silicon, facilitating the etching of the silicon layer. It was theoretically found that the selectivity of the filter was also improved thanks to the oxide layer. The parameters for the designed device include the grating pitch of 450 nm, the grating height of 100 nm and the oxide-layer height of 200 nm. As for the fabricated filter, the spectral pass band corresponded to the blue color centered at 470 nm and the peak transmission was about 40%. Within the effective area of $3{\times}3mm^2$, the variation in the relative transmission efficiency and in the center wavelength was less than 10% and 2 nm respectively. Finally, the influence of the angle of the incident beam upon the transfer characteristics of the device was investigated in terms of the rate of the relative transmission efficiency, which was found to be equivalent to 1.5%/degree.

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