Fabrication of Carbon Nanotube Field Emitters

  • Yoon, Hyeun-Joong (Department of Mechanical Engineering, Stevens Institute of Technology) ;
  • Jeong, Dae-Jung (Division of Electrical and Computer Engineering, Ajou University) ;
  • Jun, Do-Han (Division of Electrical and Computer Engineering, Ajou University) ;
  • Yang, Sang-Sik (Division of Electrical and Computer Engineering, Ajou University)
  • 발행 : 2008.03.01


This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 ${\mu}A$ when the anode voltage is 1100V. That of the triode field emitter is 3.4 pA when the anode voltage is 1000V.


  1. E. Constantin and A. Schnell, Joseph Vardi and Benjamin Avi-Itzhak, Mass Spectrometry, Ellis Horwood, London, 1990
  2. J. H. Jung, B. K. Ju, Y. H. Lee, M. H. Oh and J. Jang, 'Improvement of Electron Emission Stability of Motip Feas By DLC Coating', Information Display, Proceedings of the Fourth Asian Symposium, pp.149-152, Feb 1997
  3. G.. S. Choi, K. H. Son and D. J. Kim, 'Fabrication of high performance carbon nanotube field emitters', Microelectronic engineering, vol.66, pp.206-212, 2003
  4. W. D. Zhang, J. T. L. Thong, W. C. Tjiu, and L. M. Gan, 'Fabrication of vertically aligned carbon nanotubes patterns by chemical vapor deposition for field emitters', Diamond and related materials, vol.11, no.9, pp.1638-1642, 2002
  5. Q. H. Wang, T. D. Corrigan, J. Y. Dai, R. P. H. Chang and A. R. Krauss, 'Field emission from nanotube bundle emitters at low fields', Applied Physics Letters, vol.70, no.24, pp.3308-3310, 1997
  6. H. Murakami, M. Hirakawa, C. Tanaka and H. Yamakawa, 'Field emission from well-aligned, patterned, carbon nanotube emitters', Applied Physics Letters, vol.76, no.13, pp.1776-1778, 2000

피인용 문헌

  1. A Carbon Nanotube Field Emitter with a Triode Configuration for a Miniature Mass Spectrometer vol.61, pp.7, 2012,