Design and Manufacture of an Electron Detector for Scanning Electron Microscope

주사전자현미경용 전자검출기의 설계 및 제작

  • 전종업 (울산대학교 기계자동차공학부) ;
  • 김지원 (울산대학교 대학원 기계자동차공학과)
  • Published : 2008.04.01


Electron detectors used in scanning electron microscope accept electrons emitted from the specimen and convert them to an electrical signal that, after amplification, is used to modulate the gray-level intensities on a cathode ray tube, producing an image of the specimen. Electron detector is one of the key components dominating the performance of scanning electron microscope so that the development of electron detectors having high performance is indispensable to acquire high quality images using scanning electron microscope. In this paper, we designed and manufactured an electron detector and conducted a couple of image capture experiments using it. In particular, scintillator which generates light photons when it is struck by high-energy electrons was manufactured and experimental studies on the optimization of manufacturing condition was carried out. From experiments to evaluate the performance of our detector, it was verified that the performance of our detector is equivalent to or better than that of the conventional one.



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