DOI QR코드

DOI QR Code

Development of the Six Degree-of-Freedom Active Vibration Isolation System by Using a Phase Compensated Velocity Sensor

위상 보상된 속도 센서를 이용한 6자유도 능동 방진 시스템의 개발

  • Published : 2009.11.01

Abstract

Magnetic force driven six degree-of-freedom active vibration isolation system is developed. The velocity sensor using an electromagnetic principle that is commonly used in the vibration control is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. A lag-type compensator is adopted to reduce the phase lead and the stability test is performed by using a Bode analysis. The performance of the AVIS is validated by comparing with the passive isolation system by using the frequency responses.

Keywords

Active Vibration Isolation System;Velocity Sensor;Phase Compensate

References

  1. Park, S. I. and Quate, C. F., 1987, 'Theories of the Feedback and Vibration Isolation Systems for the Scanning Tunneling Microscope,' Rev. Sci. Instrum., Vol. 58, No. 11, pp. 2004-2009 https://doi.org/10.1063/1.1139507
  2. Jongkyu Jung, Woosub Youm and Kiyhwan Park, '3-D Nano Topology Measurement using VCM,' 2007 KSME Spring Annual Meeting, pp. 2223-2227
  3. Kyu Yong Kim, Hyun Seok Yang and Young Pil Park, 1996, 'Active Control of Isolation Table Using Hoo Control,' Trans. of the KSME A, Vol. 20, No. 10, pp. 3079-3094
  4. www.em4sys.com
  5. Park, K., Choi, D., Ozer, A., Kim, S., Lee, Y. and Joo, D., 2008, 'A Voice Coil Actuator Driven Active Vibration Isolation System Mwithe the Consideration of Flexible Mods,' Rev. Sci. Instrum., Vol. 79, No. 6, 065106 https://doi.org/10.1063/1.2930810