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High Power and Single Mode Lasing Characteristics in Vertical Cavity Surface Emitting Laser by Varying Photonic Bandgap Structures

광 결정 구조 변수에 따른 고출력 단일모드 수직공진 표면발광 레이저의 발진 특성

  • 이진웅 (세종대학교 전자정보통신공학부 광전자공학과) ;
  • 현경숙 (세종대학교 전자정보통신공학부 광전자공학과) ;
  • 신현의 (옵티시스(주) 신소자 개발팀) ;
  • 김희대 (옵티시스(주) 신소자 개발팀)
  • Published : 2009.12.25

Abstract

The high power and single mode vertical cavity surface emitting laser(VCSEL)s with photonic crystal structures have been proposed and fabricated by reducing substantially the hole numbers used in the photonic crystal structures. It is found that only six holes enable VCSELs to operate a single mode and the reliability can be enhanced by filling the holes with polyimide. The single mode lasing characteristics were analyzed by varying the oxide aperture and the hole diameter in photonic crystal structures. As a result, the single mode lasing can be stably obtained in the photonic crystal vertical cavity surface emitting lasers.

References

  1. K. Iga, F. Koyama, and S. Kinoshita, “Surface emitting semiconductor lasers,” IEEE J. Quantum Electron. 24, 1845-1855 (1988) https://doi.org/10.1109/3.7126
  2. G. E. Giudice, D. V. Kuksenkov, L. G. de Peralta, and H. Temkin, “Single-mode operation from an external cavity controlled vertical-cavity surface-emitting laser,” IEEE Photon. Technol. Lett. 11, 1545-1547 (1999) https://doi.org/10.1109/68.806841
  3. H. Martinsson, J. A. Vukusic, M. Grabherr, R. Michalzik, R. Jager, K. J. Ebeling, and A. Larsson, “Transverse mode selection in large-area oxide-confined vertical-cavity surfaceemitting lasers using a shallow surface relief,” IEEE Photon. Technol. Lett. 11, 1536-1538 (1999) https://doi.org/10.1109/68.806837
  4. K. D. Choquette, K. M. Geib, R. D. Briggs, A. A. Allerman, and J. J. Hindi, “Single transverse mode selectively oxidized vertical cavity lasers,” Proc. SPIE 3946, 230-233 (2000)
  5. H. J. Unold, S. W. Z. Mahmoud, R. Jager, M. Kicherer, M. C. Riedl, and K. J. Ebeling. “Improving single-mode VCSEL performance by introducing a long monolithic cavity.” IEEE Photon. Technol. Lett. 12, 939-941 (2000) https://doi.org/10.1109/68.867967
  6. E. W. Young, K. D. Choquette, S. L. Chuang, K. M. Geib, A. J. Fischer, and A. A. Allerman, “Single-transverse-mode vertical - cavity lasers under continuous and pulsed operation,” IEEE Photon. Technol. Lett. 13, 927-929 (2001) https://doi.org/10.1109/68.942649
  7. S. Shinada and F. Koyama, “Single high-order transverse mode surface-emitting laser with controlled far-field pattern,” IEEE Photon. Technol. Lett. 14, 1641-1643 (2002) https://doi.org/10.1109/LPT.2002.804674
  8. J. H. Baek, I. K Hwang, K. H. Lee, and Y. H. Lee, “Transverse mode control by etching depth tuning in 1120-nm GaInAs/GaAs photonic crystal vertical-cavity surface-emitting lasers,” Opt. Exp. 12, 859-867 (2004) https://doi.org/10.1364/OPEX.12.000859
  9. H. P. D. Yang, I. C. Hsu, F. I. Lai, G. Lin, R. S. Hsiao, N. A. Maleev, S. A. Blokhin, H. C. Kuo, S. C. Wang, and J. Y. Chi, “Single-mode InGaAs submonolayer quantum dot photonic crystal VCSELs,” Semicond. Sci. Technol. 21, 1176-1180 (2006) https://doi.org/10.1088/0268-1242/21/8/033
  10. T. Czyszanowski, M. Dems, H. Thienpont, and K. Panajotov, “Modal gain and confinement factors in top-and bottomemitting photonic-crystal VCSEL,” J. Phys. D : Appl. Phys. 41, 085102 (2008) https://doi.org/10.1088/0022-3727/41/8/085102
  11. N. Yokouchi, A. J. Danner, and K. D. Choquette, “Etching depth dependence of the effective refractive index in twodimensional photonic-crystal-patterned vertical-cavity surfaceemitting laser structures,” Appl. Phys. Lett. 82, 1344-1346 (2003) https://doi.org/10.1063/1.1556562
  12. D. Berkedal, N. Gregersen, S. Bischoff, M. Madsen, F. Romsted, and J. Oestergarrd, “Large-area single-mode photonic bandgap VCSELs,” in Proc. Optical Fiber Communication Conference (Georgia World Congress Center Atlanta, GA, USA, Mar. 2003), pp. 83
  13. D. S. Song, S. H. Kim, H. G. Park, C. K. Kim, and Y. H. Lee, “Single-fundamental-mode photonic-crystal vertical-cavity surface-emitting lasers,” Appl. Phys. Lett. 80, 3901-3903 (2002) https://doi.org/10.1063/1.1481984