BGA Height Measurement Using Pattern Beam

패턴 빔을 이용한 BGA 단차 측정

  • Published : 2009.12.25


We describe a simple method to obtain an optical sectioning in a conventional wide-field microscope by projecting a single spatial frequency grid pattern onto the object. Using a patterned beam, we have measured the height of BGA with a rough surface that provide the coherence noise. The configuration of the height measurement system using pattern beam is simple. The image acquired by this system is not depend on the coherence noises. This system is also applicable to the sample reference plan that has no pattern on ground. The reappearance and accuracy are outstanding and applicable to many industrial optical metrology.


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