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패턴 빔을 이용한 BGA 단차 측정

BGA Height Measurement Using Pattern Beam

  • 발행 : 2009.12.25

초록

본 연구에서는 패턴 빔을 이용하여 표면이 거친 물체의 단차를 비접촉 방식으로 측정 하는 방법에 대하여 연구하였다. 본 연구에 사용된 방법은 장치가 매우 간단하고 스페클 노이지가 영상에 미치는 영향이 작아 재현성 면에서 매우 우수하였다. 특히 기준면에 문양이 없는 경우에는 기존의 자동 초점 측정 장치로는 측정하기 어려우나, 본 연구 방법에 의해 측정이 가능함을 보였다. 그리고 측정 시간이 매우 짧고 재현성이 좋으며 장치가 간단하여 산업 현장에서 응용하기 적절한 방법이다.

참고문헌

  1. T. Dresel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992) https://doi.org/10.1364/AO.31.000919
  2. S. Brinkmann, T. Dresel, R. Schreiner, and J. Schwider, “Testing of rod objects by grazing-incidence interferometry: experiment,” Appl. Opt. 38, 121-125 (1999) https://doi.org/10.1364/AO.38.000121
  3. T. Zhang and I. Yamaguchi, “Three-dimensional microscopy with phase-shifting digital holography,” Opt. Lett. 23, 1221-1223 (1998) https://doi.org/10.1364/OL.23.001221
  4. I. Yamaguchi, J. I. Kato, S. Otha, and J. Mizuno, “Image formation in phase-shifting digital holography and applications to microscopy,” Appl. Opt. 40, 6177-6186 (2001) https://doi.org/10.1364/AO.40.006177
  5. T. Wilson, Confocal Microscopy (Academic Press, London, UK, 1990)
  6. S. Zhang and P. Huang, “High-resolution, real-time 3-D shape measurement,” Opt. Eng. 45, 123601-123607 (2006) https://doi.org/10.1117/1.2402128
  7. S. Kumar, D. Snyder, D. Duncan, J. Cohen, and J. Cooper, “Digital preservation of ancient cuneiform tablets using 3D-scanning,” in Proc. Fourth International Conference on 3-D Digital Imaging and Modeling (Banff, Alberta, Canada,2003) pp. 326-333 https://doi.org/10.1109/IM.2003.1240266
  8. P. Hariharan and Z. S. Hegedus, “Reduction of speckle in coherent imaging by spatial frequency sampling,” Opt. Acta. 21, 345-356 (1974) https://doi.org/10.1080/713818900
  9. N. Bertaux, Y. Frauel, P. Refregier, and B. Javidi, “Speckle removal using a maximum likelihood technique with isoline gray-level regularization.” J. Opt. Soc. Am. A 21, 2283-2291 (2004) https://doi.org/10.1364/JOSAA.21.002283
  10. S. P. Kelly, J. E. Ward, U. Gopinathan, and J. T. Sheridan, “Controlling speckle using lenses and free space,” Opt. Lett. 32, 3394-3396 (2007) https://doi.org/10.1364/OL.32.003394
  11. L. Firestone, K. Cook, K. Gulp, N. Talsania, and K. Preston, “Comparison of autofocus methods for automated microscopy,” Cytometry 12, 195-206 (1991) https://doi.org/10.1002/cyto.990120302
  12. X. Y. Liu, W. H. Wang, and Y. Sun, “Dynamic evaluation of autofocusing for automated microscopic analysis of blood smear and pap smear,” J. Microsc. 227, 15-23 (2007) https://doi.org/10.1111/j.1365-2818.2007.01779.x
  13. Y. Liron, Y. Paran, G. Zatorsky, B. Geiger, and Z. Kam, “Laser autofocusing for high-resolution cell biological imaging,” J. Microsc. 221, 145-151 (2006) https://doi.org/10.1111/j.1365-2818.2006.01550.x
  14. M. A. A. Neil, R. Juskaitis, and T. Wilson, “Method of obtaining optical sectioning by using structured light in a conventional microscope,” Opt. Lett. 22, 1905-1907 (1997) https://doi.org/10.1364/OL.22.001905
  15. J. N. Helbert, Handbook of VLSI Microlithography: Principles, Technology, and Applications (Noyes Press, NY, USA, 2001), Chapter 5
  16. J. R. Sheats and B. W. Smith, Microlithography: Science and Technology (CRC press, NY, USA, 1998), Chapter 3
  17. M. A. A. Neil, R. Juˇskaitis, and T. Wilson, “Method of obtaining optical sectioning by using structured light in a conventional microscope,” Opt. Lett. 22, 1905-1907 (1997) https://doi.org/10.1364/OL.22.001905