DOI QR코드

DOI QR Code

Characteristics of ITO:Ce/PET Films for Flexible Display Applications

플렉시블 디스플레이 적용을 위한 ITO:Ce/PET 박막의 물성평가

Kim, Se-Il;Kang, Yong-Min;Kwon, Se-Hee;Jung, Tae-Dong;Lee, Seung-Ho;Song, Pung-Keun
김세일;강용민;권세희;정태동;이승호;송풍근

  • Published : 2009.12.31

Abstract

ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO ($SnO_2$: 10 wt%) and $CeO_2$ doped ITO ($CeO_2$: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity $6.7{\times}10^{-4}{\Omega}cm$ was obtained from ITO:Ce film deposited using $CeO_2$ (3.0 wt%) doped ITO target. On hte other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of $CeO_2$ compared to $SnO_2$ and $In_2O_3$. Therefore, $CeO_2$ atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.

Keywords

Flexible display;Ce doped ITO;Magnetron sputtering;Bending test

References

  1. K. Sato, A. Mitsui, H. Nishimura, M. Miyazaki, Journal of Non-Crystalline Solids, 218 (1997) 323 https://doi.org/10.1016/S0022-3093(97)00241-X
  2. J. I. Han, W. K. Kim, M. G. Kwak, S. K. Park, Thin Solids Films, 397 (2001) 49 https://doi.org/10.1016/S0040-6090(01)01489-4
  3. D. K. Chambers, B. Raut, D. Qi, C. B. O'neal, S. Z. Selmic, Thin Solids Films, 517 (2009) 5743 https://doi.org/10.1016/j.tsf.2009.03.199
  4. C. M. Hsu, C. F. Liu, H. E. Cheng, W. T. Wu, Journal of Electronic Materials, 35 (2006) 3
  5. K. Masek, M. Vaclavu, P. Babor, V. Marolin, Appl. Surf. Sci., 255 (2009) 6656 https://doi.org/10.1016/j.apsusc.2009.02.080
  6. M. Fujita, H. Morikawa, Thin Solids Films, 359 (2000) 61 https://doi.org/10.1016/S0040-6090(99)00749-X
  7. S. I. Kim, S. H. Cho, S. R. Choi, M. C. Oh, J. H. Park, P. K. Song, Thin Solids Films, 517 (2009) 4061 https://doi.org/10.1016/j.tsf.2009.01.182
  8. J. R. Lee, D. Y. Lee, D. G. Kim, G. H. Lee, Y. D. Kim, P. K. Song, Met. Mater. Int., 14 (2008) 745 https://doi.org/10.3365/met.mat.2008.12.745
  9. C. Guillen, J. Herrero, Vacuum, 80 (2006) 615 https://doi.org/10.1016/j.vacuum.2005.10.006
  10. Y. M. Kang, D. Y. Lee, J. R. Lee, G. H. Lee, Y. R. Cho, P. K. Song, Current Appl. Phys., 9 (2009) S266 https://doi.org/10.1016/j.cap.2009.01.032
  11. K. E. Lee, M. Wang, E. J. Kim, S. H. Hahn, Current Appl. Phys., 9 (2009) 683 https://doi.org/10.1016/j.cap.2008.06.006
  12. P. K. Song, H. Akao, M. Kamei, Y. Shigesato, I. Yasui, Jpn. J. Appl. Phys., 38 (1999) 5224 https://doi.org/10.1143/JJAP.38.5224