Micro Electrochemical Machining Using a Multi-Function Electrode

복합기능 전극을 이용한 미세 전해가공

  • 신홍식 (서울대학교 기계항공공학부) ;
  • 김보현 (안동대학교 기계공학부) ;
  • 김규만 (경북대학교 기계공학부) ;
  • 정도관 (서울대학교 기계항공공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2009.05.01


In micro electrochemical machining(micro-ECM), it is important to measure and control the potential of a tool electrode and a workpiece electrode because electrochemical reaction rate depends on the potential of the electrodes. When the electrode potential was measured against a reference electrode, the error of measured electrode potential could be minimized by proper tool electrode design. In this paper, multi-function electrodes consisting of a tool electrode and a reference electrode was fabricated by micro fabrication techniques. The machining conditions in micro-ECM using multi-function electrodes, such as pulse voltage parameters and electrode potential, were investigated.


Micro Electrochemical Machining;Multi-Function Electrode;MEMS


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