DOI QR코드

DOI QR Code

A Passive Flow-rate Regulator Using Pressure-dependent Autonomous Deflection of Parallel Membrane Valves

압력에 따른 평행박막 밸브의 자율 변형을 이용한 수동형 유량 제어기

  • 도일 (한국과학기술원 바이오및뇌공학과, 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원 바이오및뇌공학 과 및 기계공학과, 디지털나노구동연구단)
  • Published : 2009.06.01

Abstract

We present a passive flow-rate regulator, capable to compensate inlet pressure variation and to maintain a constant flow-rate for precise liquid control. Deflection of the parallel membrane valves in the passive flowrate regulator adjusts fluidic resistance according to inlet fluid pressure without any external energy. Compared to previous passive flow-rate regulators, the present device achieves precision flow regulation functions at the lower threshold compensation pressure of 20kPa with the simpler structure. In the experimental study, the fabricated device achieves the constant flow-rate of $6.09{\pm}0.32{\mu}l/s$ over the inlet pressure range of $20{\sim}50$ kPa. The present flow-rate regulator having simple structure and lower compensation pressure level demonstrates potentials for use in integrated micropump systems.

Keywords

Passive Flow-rate Regulator;Parallel Membrane Valve;Autonomous Deflection

References

  1. Mailllefer, D., Gamper, S., Frehner, B., Balmer, P., van Lintel, H. and Renaud, P., 2001, 'A Highperformance Silicon Micropump for Disposable Drug Delivery Systems,' Proc. 14th IEEE Inter. Conf. Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland (Jan. 21-25, 2001), pp.413-417
  2. Cousseau, P., Hirschi, R., Frehner, B., Gamper, S. and Maillefer, D., 2001, 'Improved Microflow Regulator for Drug Delivery Systems,' Proc. MEMS 2001, pp. 527-530
  3. Laser, D., and Santiago, J., 2004, A Review of Micropumps,' J. Micromech. and Microeng., Vol.14, p. R35 https://doi.org/10.1088/0960-1317/14/6/R01
  4. Huang, H., and Fu, C., 2007, 'Different Fabrication Methods of Out-of-plane Polymer Hollow Needle Arrays and Their Variations,' J. Micromech. and Microeng., Vol.17, p. 393 https://doi.org/10.1088/0960-1317/17/2/027
  5. Yang, B., and Lin, Q., 2007, 'A Planar Compliancebased Self-adaptive Microfluid Variable Resistor,' J. Microelectromech. Syst., Vol.16, pp. 411-419 https://doi.org/10.1109/JMEMS.2007.892892

Cited by

  1. Dynamic Characterization of Passive Flow-Rate Regulator Using Pressure-Dependent Autonomous Deflection of Parallel Membrane Valves vol.35, pp.8, 2011, https://doi.org/10.3795/KSME-B.2011.35.8.825