The Improvement of the Ionization on Micro Mass Spectrometer using Carbon Nanotube Emitter

탄소나노튜브 방출원을 통한 초소형 질량분석기의 이온화 향상

  • 송성호 (아주대학교 전자공학과) ;
  • 한규성 (아주대학교 전자공학과) ;
  • ;
  • 이순일 (아주대학교 에너지시스템학부) ;
  • 양상식 (아주대학교 전자공학과)
  • Published : 2009.05.01


Recently, mass spectrometers are widely used for in-situ chemical analysis. It has rapid response and high sensitivity. In this paper, we present the fabrication and test of a cold cathode emitter for micro mass spectrometer using CNTs(Carbon nano tubes). The CNTs have good mechanical, electrical and chemical characteristics. So they have a long life time and strong robustness. The micro mass spectrometer is composed of the glass substrate and the silicon substrate. The glass substrate is constructed by electrodes for TOF(Time-of-flight) which analyze an ion with mass to charge ratio as ion separator. The silicon substrate is highly doped wafer which is patterned for gate electrode and then 100 11m dry etching to grow the CNTs as the electron emitter. The CNTs are grown by HFCVD(Hot filament chemical vapor deposition) with sputtering the catalyst. We successfully attained to grow the CNTs and to test the characteristics.


Micro mass spectrometer;Ion source;Electron emitter;Carbon nanotube;Micromachining


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