The Improvement of the Ionization on Micro Mass Spectrometer using Carbon Nanotube Emitter

탄소나노튜브 방출원을 통한 초소형 질량분석기의 이온화 향상

  • 송성호 (아주대학교 전자공학과) ;
  • 한규성 (아주대학교 전자공학과) ;
  • ;
  • 이순일 (아주대학교 에너지시스템학부) ;
  • 양상식 (아주대학교 전자공학과)
  • Published : 2009.05.01

Abstract

Recently, mass spectrometers are widely used for in-situ chemical analysis. It has rapid response and high sensitivity. In this paper, we present the fabrication and test of a cold cathode emitter for micro mass spectrometer using CNTs(Carbon nano tubes). The CNTs have good mechanical, electrical and chemical characteristics. So they have a long life time and strong robustness. The micro mass spectrometer is composed of the glass substrate and the silicon substrate. The glass substrate is constructed by electrodes for TOF(Time-of-flight) which analyze an ion with mass to charge ratio as ion separator. The silicon substrate is highly doped wafer which is patterned for gate electrode and then 100 11m dry etching to grow the CNTs as the electron emitter. The CNTs are grown by HFCVD(Hot filament chemical vapor deposition) with sputtering the catalyst. We successfully attained to grow the CNTs and to test the characteristics.

Keywords

Micro mass spectrometer;Ion source;Electron emitter;Carbon nanotube;Micromachining

References

  1. H. J. Yoon, S. H. Song, N. T. Hong, K. W. Jung, S. S. S. Yang, J. Micromech, Microeng., 17, 1542 (2007) https://doi.org/10.1088/0960-1317/17/8/017
  2. J. M. Houston, Physical review, 88, 2 (1952)
  3. E. Constantin, A. Schnell, 'Mass Spectrometry', ELLIS HORWOOD (1991)
  4. J. Kong, N. R. Franklin, C. Zhou, M. G. Chapline, S. Peng, Science, 287, 622 (2000) https://doi.org/10.1126/science.287.5453.622
  5. W. B. Choi, Y. W. Jin, H. Y. Kim, S. J. Lee, M. J. Yun, J. H. Kang, Appl. Phys. Lett., 78, 1547 (2001) https://doi.org/10.1063/1.1349870
  6. W. S. Cho, et al., IEEK, 35, 8, 895 (2008)
  7. Tuszewski M., Rev. Sci. Instrum., 67, 2215 (1996) https://doi.org/10.1063/1.1147039
  8. F. A. White, George M. Wood, 'Mass Spectrometry: Applications in Science and Engineering', A Willey-Interscience Publication (1986)
  9. Irma Lavagnini, 'Quantitative Applications of Mass Spectrometry', JOHN WILEY & SONS, LTD (2006)
  10. Geear M., Syms R. R. A., Wright S. and Holmes A. S., IEEE J. Microelectromech. syst., 14, 1156 (2005) https://doi.org/10.1109/JMEMS.2005.851799
  11. M. J. Kang, Polymer Science and Technology, 17, 3 (2006)
  12. S. H. Song, N. T. Hong, J. D. Han, S. S. Yang, S. Lee, The 38th KIEE Summer Conference, 1528 (2007)
  13. 김명수, '질량 분석학', 민음사 (1987)
  14. H. J. Yoon, H. Kim, E. S. Choi, S. S. Yang, K. W. Jung, Sensors Actuators A, 97-98, 441 (2002) https://doi.org/10.1016/S0924-4247(02)00032-8
  15. J. B. Cho, S. Lee, H. J. Yoon, S. S. Yang, K. H. Koh, J. Vac. Sci. Technol. B, 26, 2, 689 (2008) https://doi.org/10.1116/1.2835065
  16. H. J. Yoon, S. H. Song, N. T. Hong, K. W. Jung, S. Lee, S. S. Yang, J. Elec. Eng. & Tech., 3, 1, 121 (2008) https://doi.org/10.5370/JEET.2008.3.1.121
  17. R. H. Fowler and L. Nordheirm, Proc. R. Soc. London A119, 173 (1928)
  18. J. S. Hwang, et al., IEEE Review on Advances in Micro, Nano and Molecular Systems, 1, 557 (2006)
  19. H. B. Oh, Polymer Science and Technology, 15, 1 (2004) https://doi.org/10.1002/pat.479
  20. K. P. Wyche, R S, Blake, K. A. Willis, P. S. Monks, A. M. Ellis, Rapid Commun. Mass Spectrom., 19, 3356 (2005) https://doi.org/10.1002/rcm.2202
  21. K. A. Dean, B. R. Chalamala, J. Appl. Phys., 85, 3832 (1999) https://doi.org/10.1063/1.369753
  22. Orient O. J., Chutjian A. and Garkanian V., Rev. Sci. Instrum., 68, 1393 (1997) https://doi.org/10.1063/1.1147947
  23. Diaz J. A., Giese C. F. and Gentry W. R., J. Am. Soc, Mass Spectrom., 12. 619 (2001) https://doi.org/10.1016/S1044-0305(01)00245-8