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Characterizations of Surface Textured Silicon Substrated by XeF2 Etching System

이불화제논 기상 식각에 의한 실리콘 기판의 표면 텍스쳐링 특성

  • 김선훈 (한국광기술원 연구사업부) ;
  • 기현철 (한국광기술원) ;
  • 김두근 (한국광기술원 광융합시스템센터) ;
  • 나용범 ((주)한국유화 기업부설연구소) ;
  • 김남호 ((주)한국유화 기업부설연구소) ;
  • 김회종 (한국광기술원)
  • Received : 2010.02.26
  • Accepted : 2010.03.20
  • Published : 2010.06.01

Abstract

We investigated the haze and the surface roughness of textured Si substrates etched by $XeF_2$ etching system with the etching parameters of $XeF_2$ pressure, etching time, and etching cycle. Here the haze was obtained as a function of wavelength from the measured reflectance. The haze of textured Si substrates was strongly affected by the etching parameter of etching cycle. The surface roughness of textured Si substrates was calculated with the haze and the scalar scattering theory at the wavelength of 800 nm. Then, the surface roughness was compared with that measured by atomic force microscope. The surce roughness obtained by two methods was changed with the similar tendency n terms of $XeF_2$ etching conditions.

Keywords

$XeF_2$ Texturing;Vapor Phase Etching Haze;Roughness

Acknowledgement

Supported by : 지식경제부

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