Replication of Multi-level Microstructures by Microinjection Molding Using Modularized and Sectioned Micromold System

모듈화된 초소형 몰드 시스템(MSMS)을 이용한 다단 마이크로 구조물의 초소형 사출성형 공정

  • Lee, Bong-Kee (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Kwon, Tai-Hun (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH))
  • 이봉기 (포항공과대학교 기계공학과) ;
  • 권태헌 (포항공과대학교 기계공학과)
  • Received : 2010.01.05
  • Accepted : 2010.05.10
  • Published : 2010.07.01


In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.


Micromold System;Microinjection Molding;Modularization;LIGA Process;Multi-Level Microstructures


Supported by : 한국연구재단


  1. Char, S. K., Jung, H. J. and Jeong, K. H., 2008,"Micropatterned Complex Optical Surface for WideAngle Illumination," Proc. IEEE Optical MEMS, pp.37-38.
  2. Lee, B.-K., Cha, K. J. and Kwon, T. H., 2009,"Fabrication of Polymer Micro/Nano Hybrid LensArray by Microstructured Anodic Aluminum Oxide(AAO) Mold," Microelectron. Eng., Vol. 86, No. 4-6,pp. 857-860.
  3. Kwon, J. W. and Kim, E. S., 2002, "Multi-levelMicrofluidic Channel Routing with Protected ConvexCorners," Sens. Actuator A-Phys., Vol. 97-98, pp.729-733.
  4. Mai, J., Sun, C., Li, S. and Zhang, X., 2007, "AMicrofabricated Platform Probing CytoskeletonDynamics Using Multidirectional TopographicalCues," Biomed. Microdevices, Vol. 9, No. 4, pp.523-531.
  5. Lin, C.-Y., Su, C.-H., Hsu, C.-M. and Lin, C.-R.,2008, "Improvement of the Microcrystalline CubeCorner Reflective Structure and Efficiency," Jpn. J.Appl. Phys., Vol. 47, No. 7, pp. 5693-5701.
  6. Leclerc, E., Sakai, Y. and Fujii, T., 2003, "CellCulture in 3-Dimensional Microfluidic Structure ofPDMS(polydimethylsiloxane)," Biomed. Microdevices,Vol. 5, pp. 109-114.
  7. Yan, J., Yoshino, M., Kuriagawa, T., Shirakashi, T.,Shoji, K. and Komanduri, R., 2001, "On the DuctileMachining of Silicon for Micro Electro-mechanicalSystems (MEMS), Opto-electronic and OpticalApplications," Mater. Sci. Eng. A-Struct. Mater. Prop.Microstruct. Process., Vol. 297, No. 1-2, pp. 230-234.
  8. Heyl, P., Olschewski, T. and Wijnaendts, R. W., 2001,"Manufacturing of 3D Structures for Micro-tools Using Laser Ablation," Microelectron. Eng., Vol. 57-58, pp. 775-780.
  9. Zhang, X., Jiang, X. N. and Sun, C., 1999, "Micro-stereolithographyof Polymeric and CeramicMicrostructures," Sens. Actuator A-Phys., Vol. 77, No.2, pp. 149-156.
  10. Han, M., Lee, W., Lee, S.-K. and Lee, S. S., 2004,"3D Microfabrication with Inclined/rotated UVLithography," Sens. Actuator A-Phys., Vol. 111, No. 1,pp. 14-20.
  11. Lin, C. P., Yang, H. and Chao, C.-K., 2003,"Hexagonal Microlens array Modeling and FabricationUsing a Thermal Reflow Process," J. Micromech.Microeng., Vol. 13, No. 5, pp. 775-781.
  12. Tabata, O., You, H., Matsuzuka, N., Yamaji, T.,Uemura, S. and Dama, I, 2002, "Moving Mask DeepX-ray Lithography System with Multi Stage for 3-DMicrofabrication," Microsyst. Technol., Vol. 8, No. 2-3, pp. 93-98.
  13. Becker, E. W., Ehrfeld, W., Hagmann, P., Manner,A. and Münchmeyer, D., 1986, "Fabrication ofMicrostructures with High Aspect Ratios and GreatStructural Heights by Synchrotron RadiationLithography, Galvanoformung, and Plastic Moulding(LIGA Process)," Microelectron. Eng., Vol. 4, No. 1,pp. 35-56.
  14. Lee, B.-K. and Kwon, T. H., 2009, "Development ofModularized & Sectioned Micromold System(MSMS) via LIGA Technology," 8th InternationalWorkshop on High Aspect Ratio MicrostructureTechnology (HARMST), pp. 79-80, Saskatoon,Canada, June 25-28.