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Replication of Multi-level Microstructures by Microinjection Molding Using Modularized and Sectioned Micromold System

모듈화된 초소형 몰드 시스템(MSMS)을 이용한 다단 마이크로 구조물의 초소형 사출성형 공정

  • Lee, Bong-Kee (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Kwon, Tai-Hun (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH))
  • 이봉기 (포항공과대학교 기계공학과) ;
  • 권태헌 (포항공과대학교 기계공학과)
  • Received : 2010.01.05
  • Accepted : 2010.05.10
  • Published : 2010.07.01

Abstract

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.

Keywords

Micromold System;Microinjection Molding;Modularization;LIGA Process;Multi-Level Microstructures

Acknowledgement

Supported by : 한국연구재단

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