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Transparent Electrode Performance of TiO2/ZnS/Ag/ZnS/TiO2 Multi-Layer for PDP Filter

TiO2/ZnS/Ag/ZnS/TiO2 다층막의 PDP 필터용 전극 특성

  • Received : 2010.07.16
  • Accepted : 2010.08.20
  • Published : 2010.09.01

Abstract

The $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ multilayered structure for the transparent electrodes in plasma display panel was designed by essential macleod program (EMP) and the multilayered film was deposited on a glass substrate by direct-current (DC)/radio-frequency (RF) magnetron sputtering system. During film deposition process, the Ag layer in $TiO_2$/Ag/$TiO_2$ structure became oxidized and the filter characteristic was degraded easily. In this study, ZnS layer was adopted as a diffusion blocking layer between $TiO_2$ and Ag to prevent the oxidation of Ag layer efficiently in $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ structure. Based on the AES depth profiling analysis, the Ag layer was effectively protected by the ZnS layer as compared with the $TiO_2$/Ag/$TiO_2$ multilayered films without ZnS as an antioxidant layer. The 3 times stacked $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ films have low sheet resistance of $1.22{\Omega}/{\square}$ and luminous transmittance was as high as 62% in the visible ranges.

Keywords

$TiO_2$/ZnS/Ag/ZnS/$TiO_2$;Antioxidant layer;Transparent electrode;PDP filter

References

  1. H. Ohsaki and Y. Kokubu, Thin Solid Films 351, 1 (1999). https://doi.org/10.1016/S0040-6090(99)00147-9
  2. M. Fhaland, P. Karlsson, and C. Charton, Thin Solid Films 392, 334 (2001). https://doi.org/10.1016/S0040-6090(01)01053-7
  3. M. Bender, W. Seelig, C. Daube, H. Frankenberger, B. Ocker, and J. Stollenwerk, Thin Solid Films 326, 67 (1998). https://doi.org/10.1016/S0040-6090(98)00520-3
  4. D. Kim, Trans. Electr. Electron. Mater. 10, 165 (2009). https://doi.org/10.4313/TEEM.2009.10.5.165
  5. J. H. Lee, S. H. Lee, and C. K. Hwangbo, J. Korean Phys. Soc. 44, 750 (2004). https://doi.org/10.3938/jkps.44.750
  6. P. Grosse, R. Hertling, and T. Muggenburg, J. Non-Cryst. Solids 218, 38 (1997). https://doi.org/10.1016/S0022-3093(97)00130-0

Cited by

  1. Effect of Si3N4Buffer Layer on Transmittance of TiO2/Si3N4/Ag/Si3N4/TiO2Multi Layered Structure vol.25, pp.1, 2012, https://doi.org/10.4313/JKEM.2012.25.1.44