Fabrication of Carbon Microneedle Arrays with High Aspect Ratios and The Control of Hydrophobicity of These Arrays for Bio-Applications

고종횡비 탄소 마이크로니들 어레이의 제조 및 생체응용을 위한 소수성 표면의 제어

  • Lee, Jung-A (Center for Nano- and Quantum Science, Korea Institute of Standards and Science) ;
  • Lee, Seok-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lee, Seung-Seob (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Se-Il (Center for Nano- and Quantum Science, Korea Institute of Standards and Science) ;
  • Lee, Kwang-Cheol (Center for Nano- and Quantum Science, Korea Institute of Standards and Science)
  • 이정아 (한국표준과학연구원 나노양자연구단) ;
  • 이석우 (한국과학기술원 기계공학과) ;
  • 이승섭 (한국과학기술원 기계공학과) ;
  • 박세일 (한국표준과학연구원 나노양자연구단) ;
  • 이광철 (한국표준과학연구원 나노양자연구단)
  • Received : 2009.12.14
  • Accepted : 2010.08.06
  • Published : 2010.11.01


This paper reports the fabrication of geometry-controlled carbon microneedles by a backside exposure method and pyrolysis. The SU-8 microneedles are a polymer precursor in a carbonization process, which geometries such as base diameter, spacing, and aspect ratio can be controlled in a photolithography step. Using this fabrication method, highly reproducible carbon microneedles, which have high aspect ratios of more than 10 and very sharp nanotips, can be realized. The quartz surface with carbon microneedles becomes very hydrophilic and its wettability is adjusted by carrying out the silane treatment. In the carbon microneedle array ($3\;{\mu}m{\times}3\;{\mu}m$), the contact angle is extremly enhanced (${\sim}180^{\circ}$); this will be advantageous in developing low-drag microfluidics and labs-on-a-chip as well as in other bio-applications.


Carbon Nanotip;HAR Carbon Microneedle;MEMS;Hydrophobicity Control


Supported by : 한국과학재단


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