Atomic Layer Deposition-incorporated Catalyst Deposition for the Vertical Integration of Carbon Nanotubes

Jung, Sung-Hwan

  • Received : 2010.12.22
  • Accepted : 2011.03.17
  • Published : 2011.09.01


Carbon nanotubes (CNTs) are vertically grown inside high-aspect-ratio vertical pores of anodized aluminum oxide. A CNT catalyst layer is introduced by atomic layer deposition to the bottom of the pores, after which the CNTs are successfully grown from the layer using chemical vapor deposition. The CNTs formed a complete vertical conductive path. The conductivity of the CNT-vertical path is also measured and discussed. The present atomic layer deposition-incorporated catalyst deposition is predicted to enable the integration of CNTs with various challenging configurations, including high-aspect-ratio vertical channels or vertical interconnects.


Atomic layer deposition;Carbon nanotubes;Catalyst;Vertical channel


  1. G. S. Duesberg, A. P. Graham, F. Kreupl, M. Liebau, R. Seidel, E. Unger, and W. Honlein, "Way towards the scalable integration of carbon nanotubes into silicon based technolgy," Diamond and related materials,13, pp. 354-361, 2004.
  2. J-H Yen, I-C Leu, M-T Wu, C-C Lin, and M-H Hon, "Density control for carbon nanotube arrays synthesized by ICP-CVD using AAO/Si as a Nanotemplate," Electrochemical and solid state letters, 7, pp. H29-H31, 2004.
  3. G. P. Sklar, K. Paramguru, M. Mirsa, and J. C. LaCombe, "Pulsed electrodeposition into AAO templates for CVD growth of carbon nanotubes arrays," Nanotechnology, 16, pp. 1265-1271, 2005.
  4. A. P. Graham, G. S. Duesberg, R. Seidel, M. Liebau, E. Unger, F. Kreupl, and W. Honlein, "Towards the integration of carbon nanotubes in microelectronics," Diamond and related materials, 13, pp. 1296-1300, 2004.
  5. M. Nihei, M. Horibe, A. Kawabata, and Y. Awano, "Simultaneous formation of multiwall carbon nanotubes and their end-bonded ohmic contacts to Ti electrodes for future ULSI interconnects," Japanese Journal of Applied Physics, Vol. 43, No. 4B, pp. 1856-1859, 2004.
  6. S-K Hwang, J. Lee, S-H Jeong, P-S Lee, and K-H Lee, "Fabrication of carbon nanotube emitters in an anodic aluminum oxide nanotemplate on a Si wafer by multi-step anodization," Nanotechnology, 16, pp. 850-858, 2005.
  7. M. Rooth, A. Johansson, K. Kukli, J. Aarik, M. Boman, and A. Harsta, "Atomci layer deposition of iron oxide thin films and nanotubes using ferrocene and oxygen as precursors," Chemical Vapor Deposition, 14, pp. 67-70, 2008.
  8. J-Y. Park, S. Rosenblatt, Y. Yaish, V. Sazonova, H. Ustunel, S. Braig, T. A. Arias, P. W. Brouwer, and P. L. McEuen, "Electron-Phonon scattering in metallic single-walled carbon nanotubes," Nano Letters, 4, pp. 517-520, 2004.

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