Analyses of temperature change of a u-bolometer in Focal Plane Array with CTIA bias cancellation circuit

CTIA 바이어스 상쇄회로를 갖는 초점면 배열에서 마이크로 볼로미터의 온도변화 해석

  • Received : 2011.10.07
  • Accepted : 2011.11.02
  • Published : 2011.12.01


In this paper, we study the temperature change of a ${\mu}$-bolometer focal plane array with a capacitive transimpedance amplifier bias cancellation circuit. Thermal analysis is essential to understand the performance of a ${\mu}$-bolometer focal plane array, and to improve the temperature stability of a focal plane array characteristics. In this study, the thermal analyses of a ${\mu}$-bolometer and its two reference detectors are carried out as a function of time. The analyses are done with the $30{\mu}m$ pitch $320{\times}240$ focal plane array operating of 60 Hz frame rate and having a columnwise readout. From the results, the temperature increase of a ${\mu}$-bolometer in FPA by an incident IR is estimated as $0.689^{\circ}C$, while the temperature increase by a pulsed bias as $7.1^{\circ}C$, which is about 10 times larger than by IR. The temperature increase of a reference detector by a train of bias pulses may be increased much higher than that of an active ${\mu}$-bolometer. The suppression of temperature increase in a reference bolometer can be done by increasing the thermal conductivity of the reference bolometer, in which the selection of thermal conductivity also determines the range of CTIA output voltage.


${\mu}$-bolometer;FPA;Thermal analyses;CTIA bias cancellation circuit;High speed operation


  1. D. Murphy, M. Ray, J. Wyles, C. Hewitt, R. Wyles, E. Gordon, K. Almada, T. Sessler, S. Baur, D. Van Lue and S. Black, "640 ${\times}$ 512 17 ${\mu}m$ Microbolometer FPA and Sensor Development", Proc. of SPIE 6542, pp. 65421Z-1-10, 2007.
  2. F. Niklaus, C. Jansson, A. Decharat, J. Källhammer, H. Pettersson and G. Stemme, "Uncooled Infrared Bolometer Arrays Operating in a Low to Medium Vacuum Atmosphere: Performance Model and Tradeoffs", Proc. of SPIE 6542, pp. 65421M-1-12, 2007.
  3. M. Almasri, B. Xu and J. Castracane, "Amorphous silicon two-color microbolometer for uncooled IR detection", IEEE Sensors journal, vol. 6, no. 2 2006.
  4. P. Ericsson, A.C. Fisher, F. Fosberg, N. Roxhed, B. Samel, S. Savage, G. Stemme, S. Wissmar, O. Oeberg, F. Niklaus, "Towards 17 ${\mu}m$ pitch heterogeneously integrated Si/Ge quantum well bolometer FPAs", Proc. of SPIE 8012, pp 801212-1-9, 2011.
  5. J.L. Tissot, IR detection with uncooled sensors, Infrared Physics & Technology 46. 147-153, 2004.
  6. C. Li, G. Skidmore, and C. Han, "Uncooled VOx Infrared sensor development and application", Proc. of SPIE 8012, pp 80121N-1-8, 2011.
  7. M. Kohin and N. Butler, "Performance limits of uncooled VOx microbolometer focal plane array", Proc. of SPIE 5406, pp 447-453, 2004.
  8. M. Tepegoz, F. Civitchi, and T. Akin, "An optimum reference detector design for uncooled microbolometer FPAs", Proc. of SPIE 6940, pp 694028-1-8, 2008.
  9. W. Parrish, J. Woolaway, "Improvements in uncooled systems using bias equalization", Proc. of SPIE 3698, pp 748-755, 1999.
  10. E. L. Dereniak and G. D. Boreman, Infrared Detectors and Systems, Wiley, New York, pp.395-414, 1996.
  11. R. A. Wood, "Monolithic Silicon Microbolometer Arrays," in Uncooled Infrared Imaging Arrays and Systems, P. Kruse and D. Skatrud, Editors, Semiconductors and Semimetals, Academic Press, New York, pp. 43-121, 1997.
  12. P. Eriksson, Jan Y. Anderson and G. Stemme, "Thermal Characterization of Surface-Micromachined Silicon Nitride Membranes for Thermal Infrared Detectors", J. MEMS, Vol. 6, No. 1, pp. 55-61, March 1997.
  13. D. Murphy, W. Radford, M. Ray, S. Propst, A Kennedy, J. Kojiro, J. Woolaway, K. Soch, R. Coda, G. Lung, E. Moody, D. Gleichman, and S. Baur, "320 ${\times}$ 240 silicon microbolometer uncooled IRFPAs with on-chip offset correction", Proc. of SPIE Vol. 2746, pp. 82-92, 1996.
  14. C.H. Hwang, D.H. Woo, Y.S. Lee, and H.C. Lee, "Readout integrated circuit for microbolometer with an analog non-uniformity correction", Proc. of SPIE 5987, pp 59870P-1-8, 2005.
  15. D. Jakonis, C. Svensson, C. Jansson "Readout architectures for uncooled IR detector arrays", Sensors and Actuators 84, pp. 220-229, 2000.
  16. R. A. Richwine, Y. R. Puri, A. K. Sood, R. S. Balcerak, S. Horn, G. Baker and M. Wilson, "Microbolometer Sensor Model for Performance Predictions and Real-Time Image Generation of Infrared Scenes and Targets, Proc. of SPIE Vol.7055, pp. 7055T-1-11, 2008.