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Experimental Study on Electrical Discharge in Nanoscale Gaps

나노간극에 발생하는 전기방전의 실험적연구

  • Lee, Young-Min (Dept. of Applied Computer Mold design, Korea Poly-tech VI) ;
  • Choi, Hae-Woon (Mechanical and Automotive Engineering, Keimyung Univ.,)
  • 이영민 (한국폴리텍 VI 대학 컴퓨터응용금형학과) ;
  • 최해운 (계명대학교 기계자동차공학과)
  • Received : 2010.09.11
  • Accepted : 2011.02.14
  • Published : 2011.05.01

Abstract

We present an experimental study of electrical discharge in nanoscale gaps. The discharge occurred between a cathode made of sharpened Pt-Ir wire and a gold-plated anode. Electric discharges were detected for electric potentials from 10 V to 80 V, and their gaps ranged from 50 nm to 800 nm. The spark signals indirectly showed spark phenomena such as discharges or shortages in the system. The sparks and discharges strongly depended on the electric potential (voltage) and the radius of the tips. For small gaps, the electrical discharge was random and strongly depended on the radius of the cathode tips.

Keywords

Nanogap;Electrical Discharge;Micromachining

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