Prediction of the Performance Distributions and Manufacturing Yields of a MEMS Accelerometer

MEMS 가속도계의 성능분포 및 제조수율 예측

  • Kim, Yong-Il (Dept. of Mechanical Engineering, Hanyang Univ.) ;
  • Yoo, Hong-Hee (Dept. of Mechanical Engineering, Hanyang Univ.)
  • 김용일 (한양대학교 기계공학과) ;
  • 유홍희 (한양대학교 기계공학과)
  • Received : 2011.01.24
  • Accepted : 2011.04.27
  • Published : 2011.07.01


All mechanical-system parameters have uncertainty, and this uncertainty directly affects system performances and results in a decrease in the manufacturing outputs. In particular, since the size of a MEMS system is extremely small, the manufacturing tolerances of a MEMS system are relatively large when compared to the tolerances of a macro-scale system. High manufacturing tolerances result from an increase in the uncertainty of the system parameters, thereby affecting the performances and manufacturing yields. In this paper, the performance uncertainty of a MEMS accelerometer due to system parameter uncertainty is analyzed by using several uncertainty analysis methods. Finally, the performance distributions and manufacturing yields of the MEMS accelerometer are predicted.


MEMS Accelerometer;Uncertainty;Sensitivity;Measurable Frequency Range;Performance Distribution;Manufacturing Yield


Supported by : 한국연구재단


  1. Yazdi, N., Ayazi, F. and Najafi, K., 1998, " Micromachined Inertial Sensors," Proceedings of the IEEE, Vol. 86, No. 8, pp. 1640-1659.
  2. Roylance, L. M. and Angell, J. B., 1979, "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, Vol. ED-26, No. 12, pp. 1895-1905.
  3. Rodulf F., 1983, "A Micromechanical Capacitive Accelerometer with a Two-point Inertial-Mass Suspension," Sensors and Actuators, Vol. 4, pp. 191-198.
  4. Kuehnel W. and Sherman S., 1994, "A Surface Micromachined Silicon Accelerometer with On-Chip Detection Circuitry," Sensors and Actuators A, Vol. 45, pp. 7-16.
  5. van Kampen R. P. and Wolffenbuttel R. F., 1998, "Modeling the Mechanical Behavior of Bulk-Micromachined Silicon Accelerometers," Sensors and Actuators A, Vol. 64, pp. 137-150.
  6. Wang, Q. M., Yang, Z., Li, F. and Smolinski, P., 2004, "Analysis of Thin Film Piezoelectric Microaccelerometer using Analytical and Finite Element Modeling," Sensors and Actuators A, Vol. 113, pp. 1-11.
  7. Puers, R. and Reyntjens, S., 1998, "Design and Processing Experiments of a New Miniaturized Capacitive Triaxial Accelerometer," Sensors and Actuators A, Vol. 68, pp. 324-328.
  8. Amarasinghe, R., Dao, D. V., Toriyama, T. and Sugiyama, S., 2007, "Development of Miniaturized 6-Axis Accelerometer Utilizing Piezoresistive Sensing Slements," Sensors and Actuators A, Vol. 134, pp. 310-320.
  9. Eckhardt, R., 1987, Stan Ulam, John von Neumann, and the Monte Carlo method, Los Alamos Science Special Issue.
  10. Hasofer, A. M. and N. C. Lind, 1974, "Exact and Invariant Second Moment Code Format," Journal of the Engineering Mechanics Division, ASCE, Vol. 100, pp. 111-121
  11. Kim, B. S., Eom, S. M., Yoo, H. H., 2009, "Design Variable Tolerance on the Natural Frequency Variance of Constrained Multi-Body Systems in Dynamic Equilibrium," Journal of Sound and Vibration, Vol. 320, pp. 545-558.
  12. Kim, Y. W. and Yoo, H. H., 2010, "Design of a Vibrating MEMS Gyroscope Considering Design Variable Uncertainties," Journal of Mechanical Science and Technology, Vol. 24, No. 11, pp.2175-2180.
  13. Rahman, S., Xu, H., 2004, "A Univariate Dimension-Reduction Method for Multi-Dimensional Integration in Stochastic Mechanics," Probablistic Engineering Mechanics, Vol. 19, pp. 393-408.
  14. Youn, B. D., Xi, Z., Wang, P., 2008, "Eigenvector Dimension Reduction (EDR) Method for Sensitivity-Free Probability Analysis," Struct Multidisc Optim Vol. 37, pp. 13-28.
  15. Bao, M., 2000, Handbook of Sensors and Actuators Volume 8 Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes. Elsevier.

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