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Prediction of the Performance Distributions and Manufacturing Yields of a MEMS Accelerometer

MEMS 가속도계의 성능분포 및 제조수율 예측

  • Kim, Yong-Il (Dept. of Mechanical Engineering, Hanyang Univ.) ;
  • Yoo, Hong-Hee (Dept. of Mechanical Engineering, Hanyang Univ.)
  • 김용일 (한양대학교 기계공학과) ;
  • 유홍희 (한양대학교 기계공학과)
  • Received : 2011.01.24
  • Accepted : 2011.04.27
  • Published : 2011.07.01

Abstract

All mechanical-system parameters have uncertainty, and this uncertainty directly affects system performances and results in a decrease in the manufacturing outputs. In particular, since the size of a MEMS system is extremely small, the manufacturing tolerances of a MEMS system are relatively large when compared to the tolerances of a macro-scale system. High manufacturing tolerances result from an increase in the uncertainty of the system parameters, thereby affecting the performances and manufacturing yields. In this paper, the performance uncertainty of a MEMS accelerometer due to system parameter uncertainty is analyzed by using several uncertainty analysis methods. Finally, the performance distributions and manufacturing yields of the MEMS accelerometer are predicted.

Keywords

MEMS Accelerometer;Uncertainty;Sensitivity;Measurable Frequency Range;Performance Distribution;Manufacturing Yield

Acknowledgement

Supported by : 한국연구재단

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