Study on Basic Characteristics of Hollow Piezoelectric Actuator for Driving Nanoscale Stamp

나노스템프 구동용 중공형 압전액추에이터 기본특성에 관한 연구

  • Park, Jung-Ho (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Hu-Seung (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Yun, So-Nam (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Ham, Young-Bog (Energy Plant Research Division, Korea Institute of Machinery & Materials) ;
  • Jang, Sung-Cheol (Dept. of Aviation Mechatronics, Korea Aviation Polytechnic)
  • 박중호 (한국기계연구원 에너지플랜트연구본부) ;
  • 이후승 (한국기계연구원 에너지플랜트연구본부) ;
  • 이재종 (한국기계연구원 나노융합. 생산시스템연구본부) ;
  • 윤소남 (한국기계연구원 에너지플랜트연구본부) ;
  • 함영복 (한국기계연구원 에너지플랜트연구본부) ;
  • 장성철 (한국폴리텍항공대학 항공메카트로닉스과)
  • Received : 2010.12.16
  • Accepted : 2011.07.18
  • Published : 2011.09.01


Nanoimprint lithography has been actively investigated. This method can replicate a nanopatterned master stamp onto a thin polymer film on a silicon substrate and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly developed. This actuator is used for driving a nanoscale stamp in nanoimprint lithography instead of a conventional electric motor. The fabricated prototype actuator has 95 layers and side lengths of 23 mm and 18 mm for the outer and inner squares, respectively. By adopting a novel process instead of the conventional forming process for fabricating a one-layer actuator, the one-layer is composed of four rectangular segments produced by sawing a ceramic film with a thickness of 0.3 mm. The basic characteristics on displacement and generation force of the fabricated prototype actuator are experimentally investigated. Furthermore, the displacement characteristics obtained by using a PI controller are tested and discussed.


Piezoelectric Actuator;Nanoimprint Lithography;Hollow Actuator;Nanoscale Stamp


Grant : 다층나노임프린팅 장비 핵심원천기술개발


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