Preparation and Characterization of Plasma Polymerized Methyl Methacrylate Thin Films as Gate Dielectric for Organic Thin Film Transistor

Ao, Wei;Lim, Jae-Sung;Shin, Paik-Kyun

  • 투고 : 2010.11.29
  • 심사 : 2011.06.01
  • 발행 : 2011.11.01


Plasma polymerized methyl methacrylate (ppMMA) thin films were deposited by plasma polymerization technique with different plasma powers and subsequently thermally treated at temperatures of 60 to $150^{\circ}C$. To find a better ppMMA preparation technique for application to organic thin film transistor (OTFT) as dielectric layer, the chemical composition, surface morphology, and electrical properties of ppMMA were investigated. The effect of ppMMA thin-film preparation conditions on the resulting thin film properties were discussed, specifically O-H site content in the pMMA, dielectric constant, leakage current density, and hysteresis.


Plasma polymerized methyl methacrylate (ppMMA);Organic thin film transistor (OTFT);Dielectric layer;Hysteresis


  1. Y.H. Noh, S.Y. Park, S.M. Seo, H.H. Lee, "Root cause of hysteresis in organic thin film transistor with polymer dielectric," Org. Elect., vol.7, 2006, pp.271-275.
  2. J. Puigdollers, C. Voz, A. Orpella, R. Quidant, I. Martin, M. Vetter, "Pentacene thin-film transistors with polymeric gate dielectric", Org. Elect., vol.5, 2004, pp.67-71.
  3. J.Veres, S. Ogier, G. Lloyd, D. Leeuw, "Gate insulators in organic field-effect transistors", Chem. Mater., vol.16, 2004, pp.4543-4555.
  4. J.A.Rogers, Z. Bao, A. Makhija, P. Braun, "Printing process suitable for reel-to-reel production of highperformance organic transistors and circuits", Adv. Mater., vol.11, 1999, pp.741-475.<741::AID-ADMA741>3.0.CO;2-L
  5. A. Facchetti, M.-H. Yoon, T.J. Marks, "Gate dielectrics for organic field-effect transistors: new opportunities for organic electronics", Adv. Mater., vol.17, 2005, pp.1705-1725.
  6. S. Pyo, H. Son, K.-Y. Choi, M.H. Yi, S.K. Hong, "Low-temperature processable inherently photosensitive polyimide as a gate insulator for organic thin-film transistors", Appl. Phys. Lett., vol. 86, 2005, pp.1335081-1335083.
  7. S.H. Lee, D.J. Choo, S.H. Han, J.H. Kim, Y.R. Son, J. Jang, "High performance organic thin-film transistors with photopatterned gate dielectric", Appl. Phys. Lett., vol. 90, 2007, pp.0335021-0335023.
  8. Y.S. Park, S.J. Cho, J.H. Boo, B. Hong "Surface and electrical properties of organic inorganic hybrid structure as gate insulator to organic thin film transistor", appl. surf., vol. 256, 2009, pp.1023-1027.
  9. G. Gu, M.G. Kane, J.E. Doty, A.H. Firester, "Electron traps and hysteresis in pentacene-based organic thinfilm transistors", Appl. Phys. Lett., vol. 87, 2005, pp.2435121-2435123.
  10. W.J. Yoon, D. Bhattacharyya, Richard B. Timmons, Paul R. Berger, "Plasma polymerized multistacked bipolar gate dielectric for organic thin-film transistors", Organic Electronics, vol.11, Issue 11, pp.1767-1771, 2010.
  11. S.M. Park, T. Ikegami, K. Ebihara, and P.K. Shin, "Enhanced performance of organic light-emitting devices with plasma treated ITO surface and plasma polymerized thiophene buffer layer", Current Applied Physics, vol.7, Issue 5, 2007, pp.474-479.
  12. J. Jang , S. H. Han, "High-performance OTFT and its application", Appl. Phys. Lett., vol. 6S1, 2006, pp.e17-e21.
  13. J.S. Lim and P.K. Shin, "Improved performance of organic light emitting devices with plasma treated ITO surface and plasma polymerized methyl methacrylate buffer layer", Appl. Surf. Sci., vol.253, 2007, pp.3828-3833.
  14. M.T. Kabomo and F.D. Blum, "Glass transition behavior of PMMA thin films", Polymer Preprints. vol. 42(2), 2001, pp.67-68.
  15. Y. Jang, D.H. Kim, Y.D. Paik, J.H. Cho, M. Hwang, and K. Cho, "Influence of the dielectric constant of a polyvinyl phenol insulator on the field-effect mobility of a pentacene-based thin-film transistor", Appl. Phys. Lett., vol. 87, 2005, pp.1521051-1521053.
  16. J.S. Lim, B.J. Lee, S. Lee, and P.K. Shin, "Plasma polymerized methyl methacrylate gate dielectric for organic thin-film transistors", Org. Elect., vol.11, 2010, pp.951-954.
  17. W.C. Shin, H. Moon, S.H. Yoo, B.J. Cho, "Low-Voltage High-Performance Pentacene Thin-Film Transistors With Ultrathin PVP/High-K HfLaO Hybrid Gate Dielectric", Electron device letters, vol.31, 2010, pp.1308-1310.
  18. J.B. Koo, S.Y. Kang, I.K. You, K.S. Suh, "Effect of UV/ozone treatment on hysteresis of pentacene thinfilm transistor with polymer gate dielectric", solidstate electronics. Vol. 53 pp.621-625, 2009.

피인용 문헌

  1. Electrical conduction mechanism in plasma polymerized 2-(diethylamino)ethyl methacrylate thin films vol.55, pp.12, 2015,
  2. Effect of heat treatment on the structural and optical characteristics of plasma deposited 2-(diethylamino)ethyl methacrylate thin films by a capacitively coupled glow discharge plasma system vol.88, pp.4, 2013,


연구 과제 주관 기관 : INHA University