DOI QR코드

DOI QR Code

Preparation and Characterization of Plasma Polymerized Methyl Methacrylate Thin Films as Gate Dielectric for Organic Thin Film Transistor

Ao, Wei;Lim, Jae-Sung;Shin, Paik-Kyun

  • 투고 : 2010.11.29
  • 심사 : 2011.06.01
  • 발행 : 2011.11.01

초록

Plasma polymerized methyl methacrylate (ppMMA) thin films were deposited by plasma polymerization technique with different plasma powers and subsequently thermally treated at temperatures of 60 to $150^{\circ}C$. To find a better ppMMA preparation technique for application to organic thin film transistor (OTFT) as dielectric layer, the chemical composition, surface morphology, and electrical properties of ppMMA were investigated. The effect of ppMMA thin-film preparation conditions on the resulting thin film properties were discussed, specifically O-H site content in the pMMA, dielectric constant, leakage current density, and hysteresis.

키워드

Plasma polymerized methyl methacrylate (ppMMA);Organic thin film transistor (OTFT);Dielectric layer;Hysteresis

참고문헌

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피인용 문헌

  1. Electrical conduction mechanism in plasma polymerized 2-(diethylamino)ethyl methacrylate thin films vol.55, pp.12, 2015, https://doi.org/10.1002/pen.24161
  2. Effect of heat treatment on the structural and optical characteristics of plasma deposited 2-(diethylamino)ethyl methacrylate thin films by a capacitively coupled glow discharge plasma system vol.88, pp.4, 2013, https://doi.org/10.1088/0031-8949/88/04/045502

과제정보

연구 과제 주관 기관 : INHA University