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Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source

  • Received : 2010.04.07
  • Accepted : 2011.09.01
  • Published : 2012.01.01

Abstract

A two-dimensional nonlocal heating theory of planar-type inductively coupled plasma source has been previously reported with a filamentary antenna current model. However, such model yields an infinite value of electric field at the antenna position, resulting in the infinite self-inductance of the antenna. To overcome this problem, a surface current model of antenna should be adopted in the calculation of the electromagnetic fields. In the present study, the reactor impedance is calculated based on the surface current model and the dependence on various discharge parameters is studied. In addition, a simpler method is suggested and compared with the surface current calculation.

Keywords

Acknowledgement

Supported by : Chungbuk National University

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