Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique

DOI QR코드

DOI QR Code

Myoung, Hee-Bok;Zhang, Teng Fei;Park, Jong-Keuk;Kim, Doo-In;Kim, Kwang Ho

  • 투고 : 2012.11.06
  • 심사 : 2012.12.30
  • 발행 : 2012.12.31

초록

Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a $TiB_2$ and a Cr target in argon-nitrogen environment, respectively. By changing the power applied on the Cr and $TiB_2$ cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the $CrTi_{0.1}B_{0.4}N_{1.3}$, and then decreased with further increase of Cr content in the coatings, and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of the Cr-Ti-B-N coatings revealed better properties due to the formation of a nanocomposite microstructure.

키워드

HIPIMS;Cr-Ti-B-N coatings;Nanocomposite;Friction;Anti-corrosion

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피인용 문헌

  1. 1. An investigation on the crack resistance of CrN, CrBN and CrTiBN coatings via nanoindentation vol.145, 2017, doi:10.5695/JKISE.2011.45.6.232

과제정보

연구 과제 주관 기관 : Ministry of Knowledge Economy