DOI QR코드

DOI QR Code

A Study on the Dielectric Barrier Discharges Plasmas of Flat Atmospheric Pressure Using an AC Pulse Voltage

교류 펄스 전압을 이용한 평판형 대기압 유전격벽방전 플라즈마의 특성 분석

  • 이종봉 (부산대학교 전자전기공학과) ;
  • 하창승 (부산대학교 전자전기공학과) ;
  • 김동현 (부산대학교 전자전기공학과) ;
  • 이호준 (부산대학교 전자전기공학과) ;
  • 이해준 (부산대학교 전자전기공학과)
  • Received : 2011.12.22
  • Accepted : 2011.12.30
  • Published : 2012.05.01

Abstract

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

References

  1. E. E. Kunhardt, "Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium Plasmas," IEEE Trans. Plasma Sci. Vol 28, 189 (2000) https://doi.org/10.1109/27.842901
  2. S. Kanazawa, M. Kogoma, T. Moriwaki, and S. Okazaki, "Stable glow plasma at atmospheric pressure,"J. Phys. D 21, 838 (1988) https://doi.org/10.1088/0022-3727/21/5/028
  3. T. C. Montie, K. Kelly-Wintenberg, and J. R. Roth, IEEE Trans. Plasma Sci. 28, 41 (2000) https://doi.org/10.1109/27.842860
  4. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
  5. M. Moravej, X. Yang, R. F. Hicks, J. Penelon, and S. E. Babayan, "A radiofrequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen," J. Appl. Phys., vol. 99, no. 9, p. 093305, May (2006) https://doi.org/10.1063/1.2193647
  6. E. Stoffels, A. J. Flikweert,W.W. Stoffels, and G. M.W. Kroesen, "Plasma needle: A non-destructive atmospheric plasma source for fine surface treatment of (bio) materials," Plasma Sources Sci. Technol., vol. 11, no. 4, pp. 383-388, Aug. (2002) https://doi.org/10.1088/0963-0252/11/4/304
  7. J. L.Walsh, J. J. Shi, andM. G. Kong, "Contrasting characteristics of pulsed and sinusoidal cold atmospheric plasma jets," Appl. Phys. Lett., vol. 88, no. 17, p. 171 501, Apr. (2006)
  8. B. Eliasson and U. Kogelschatz, IEEE Trans. Plasma Sci. 19, 1063 (1991) https://doi.org/10.1109/27.125031
  9. A. Schutze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks, "The Atmospheric-Pressure Plasma Jet: A Review and Comparison to Other Plasma Sources," IEEE Trans. Plasma Sci. 26, No. 6, 1685 (1998) https://doi.org/10.1109/27.747887

Cited by

  1. The Analysis of DC Plasmas Characteristics on SFSF6and N2Mixture Gases vol.63, pp.10, 2014, https://doi.org/10.5370/KIEE.2014.63.10.1485