Design of Vertical Type Probe Tip Using Finite Element Analysis

유한요소해석을 이용한 수직형 프로브 팁의 설계

  • Received : 2011.10.24
  • Accepted : 2012.06.12
  • Published : 2012.08.01


The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process. A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and $100{\mu}m$(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1~2 gf(Contact Force) and $100{\mu}m$(Over drive).


Probe Test;Probe Tip;MEMS Process;FE Analysis


Supported by : 한국연구재단


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