Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

  • Ahn, SeongDeok (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kang, Seong Youl (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Oh, Ji Young (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Suh, Kyung Soo (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Cho, Kyoung Ik (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Koo, Jae Bon (Convergence Components & Materials Research Laboratory, ETRI)
  • Received : 2012.06.19
  • Accepted : 2012.07.27
  • Published : 2012.12.31


In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are $0.1cm^2/Vs$ and $10^6$, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.


Supported by : MKE


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