DOI QR코드

DOI QR Code

Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

  • Ahn, SeongDeok (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kang, Seong Youl (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Oh, Ji Young (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Suh, Kyung Soo (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Cho, Kyoung Ik (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Koo, Jae Bon (Convergence Components & Materials Research Laboratory, ETRI)
  • 투고 : 2012.06.19
  • 심사 : 2012.07.27
  • 발행 : 2012.12.31

초록

In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are $0.1cm^2/Vs$ and $10^6$, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.

과제정보

연구 과제 주관 기관 : MKE

참고문헌

  1. C.D. Dimitrakopoulos and P.R.L. Molenfant, "Organic Thin Film Transistors for Large Area Electronics," Adv. Mater., vol. 14, no. 2, Jan. 2002, pp. 99-117. https://doi.org/10.1002/1521-4095(20020116)14:2<99::AID-ADMA99>3.0.CO;2-9
  2. C.D. Dimitrakopoulos et al., "Low-Voltage Organic Transistors on Plastic Comprising High-Dielectric Constant Gate Insulators," Science, vol. 283, no. 5403, Feb. 1999, pp. 822-824. https://doi.org/10.1126/science.283.5403.822
  3. Y.Y. Noh et al., "Downscaling of Self-Aligned, All-Printed Polymer Thin-Film Transistors," Nature Nanotechnol., vol. 2, Dec. 2007, pp. 784-789. https://doi.org/10.1038/nnano.2007.365
  4. K.J. Baeg et al., "Polymer Dielectrics and Orthogonal Solvent Effects for High-Performance Inkjet-Printed Top-Gated PChannel Polymer Field-Effect Transistors," ETRI J., vol. 33, no. 6, Dec. 2011, pp. 887-896. https://doi.org/10.4218/etrij.11.0111.0321
  5. K.J. Baeg et al., "Improved Performance Uniformity of Inkjet Printed N-Channel Organic Field-Effect Transistors and Complementary Inverters," Organic Electron., vol. 12, no. 4, Apr. 2011, pp. 634-640. https://doi.org/10.1016/j.orgel.2011.01.016
  6. C.D. Dimitrakopoulos, A.R. Brown, and A. Pomp, "Molecular Beam Deposited Thin Films of Pentacene for Organic Field Effect Transistor Applications," J. Appl. Phys., vol. 80, no. 4, Aug. 1996, pp. 2501-2508. https://doi.org/10.1063/1.363032
  7. D.J. Gundlach et al., "Pentacene Organic Thin-Film Transistors- Molecular Ordering and Mobility," IEEE Electron Device. Lett., vol. 18, no. 3, Mar. 1997, pp. 87-89. https://doi.org/10.1109/55.556089
  8. T. Sekitani, T. Someya, and T. Sakurai, "Effects of Annealing on Pentacene Field-Effect Transistors Using Polyimide Gate Dielectric Layers," J. Appl. Phys., vol. 100, no. 2, Feb. 2006, 024513. https://doi.org/10.1063/1.2216883
  9. M. Shtein et al., "Material Transport Regimes and Mechanisms for Growth of Molecular Organic Thin Films Using Low- Pressure Organic Vapor Phase Deposition," J. Appl. Phys., vol. 89, no. 2, Jan. 2001, pp. 1470-1476. https://doi.org/10.1063/1.1332419
  10. J.H. Lee et al., "Interlayer Engineering with Different Host Material Properties in Blue Phosphorescent Organic Light- Emitting Diodes," ETRI J., vol. 33, no. 1, Feb. 2011, pp. 32-38. https://doi.org/10.4218/etrij.11.0110.0172
  11. S.D. Ahn et al., Method and Apparatus Using Large Area Organic Vapor Deposition for Organic Thin Film and Organic Devices, KS Patent 0,473,806, to ETRI, Patent and Trademark Office, Daejeon, Rep. of Korea, 2005.
  12. H.C. Oh et al., "Improved Stability of Atomic Layer Deposited ZnO Thin Film Transistor by Intercycle Oxidation," ETRI J., vol. 34, no. 2, Apr. 2012, pp. 280-283. https://doi.org/10.4218/etrij.12.0211.0186