Fabrication of piezoelectric PZT thick film by aerosol deposition method

에어로졸 증착법에 의한 압전 PZT 후막의 제조

  • Received : 2013.06.24
  • Accepted : 2013.12.18
  • Published : 2013.12.31


Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.


PZT powder;Aerosol deposition method;FE-SEM;Thick film;Ceramics;TEM


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Supported by : 부경대학교