DOI QR코드

DOI QR Code

Fabrication of piezoelectric PZT thick film by aerosol deposition method

에어로졸 증착법에 의한 압전 PZT 후막의 제조

  • Received : 2013.06.24
  • Accepted : 2013.12.18
  • Published : 2013.12.31

Abstract

Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

Keywords

PZT powder;Aerosol deposition method;FE-SEM;Thick film;Ceramics;TEM

References

  1. Akedo, J., Lebedev, M., 1999. Microstructure and Electrical Properties of Lead Zirconate Titanate Thick Films Deposited by Aerosol Deposition Method. Jpn. J Appl Phy., 38, 5397-5401. https://doi.org/10.1143/JJAP.38.5397
  2. Chen, H.D., Udayakumar, K.R., Cross, L.E., Bernstein, J.J., Niles, L.C., 1995. Dielectric, Ferroelectric, and Piezoelectric Properties of Lead Zirconate Titanate Thick Films on Silicon Substrates. J. Appl. Phys., 77, 3349-3353. https://doi.org/10.1063/1.358621
  3. Corker, D.L., Zhang, Q., Whatmore, R.W., Perrin, C., 2002. PZT 'composite' Ferroelectric Thick Films. J. Euro. Ceram. Soc., 22, 383-390. https://doi.org/10.1016/S0955-2219(01)00260-6
  4. Evans, A.G., Hutchinson, J.W., 1995. The Thermomechanical Integrity of Thin Films and Multilayers. Acta. Metall. Mater., 43(7), 2507-2530. https://doi.org/10.1016/0956-7151(94)00444-M
  5. Haertling, G.H., 1999. Ferroeletric Ceramics: History and Technology. J. Am. Ceram. Soc., 84(3), 797-818.
  6. Hong, D.S., Kim, J.T., 2012. Temperature Effect on Impedence-based Damage of Steel-Bolt Connection using wireless Impedence Sensor Node. J. Korean Society of Ocean Engineers, 26(1), 27-33.
  7. Kong, L.B., Ma, J., Zhu, W., Tan, O.K., 2000. Highly Enhanced Sinterability of Commercial PZT Powders by High-Energy Ball Milling. Mater. Lett., 46, 274-280. https://doi.org/10.1016/S0167-577X(00)00185-3
  8. Park, J.H., Lee, S.H., Kim, J.T., 2010. Development of Acceleration-PZT Impedence Hybrid Sensor Nodes Embedding Damage Identification Algorithm for PSC Girders. J. Korean Society of Ocean Engineers, 24(3), 1-10.
  9. Park, Y., Lee, J.K., Chung, I., Lee, J.Y., 2001. Delamination Behavior of Pt in a SiO2/Pb(ZrxTi1-x)O3/Pt Ferroelectric Thin-Film Capacitor. J. Appl. Phys., 89(3), 2327-2331. https://doi.org/10.1063/1.1326463
  10. Schwartz, R.W., 1997. Chemical Solution Deposition of Perovskite Thin Films. Chem. Mater., 9, 2325-2340. https://doi.org/10.1021/cm970286f
  11. Silva, M.S., Cilense, M., Orhan, E., Goes, M.S., Machado, M.A.C., Santos, L.P.S., Paiva-Santos, C.O., Longo, F.,Varela, J.A., Zahete, M.A., Pizani, P.S., 2005. The Nature of the Phtoluminescence in Amorphized PZT. J. Lumin., 111(3), 205-213. https://doi.org/10.1016/j.jlumin.2004.08.045
  12. Thiele, E.S., Damjanovic, D., Setter, N., 2001. Processing and Properties of Screen-Printed Lead Zriconate Titanate Piezoelectric Thick Films on Electroed Silicon. J. Am. Ceram. Soc., 84 (12), 2863-2868. https://doi.org/10.1111/j.1151-2916.2001.tb01106.x
  13. Yao, K., He, X., Xu, Y., Chen, M., 2005. Screen Printed Piezoelectric Ceramic Thick Films with Sintering Additives Introduced through a Liquid-phase Approach. Sens. Actuators A, 118, 342-348. https://doi.org/10.1016/j.sna.2004.08.022

Cited by

  1. Electrical properties of piezoelectric PZT thick film by aerosol deposition method vol.25, pp.6, 2015, https://doi.org/10.6111/JKCGCT.2015.25.6.239

Acknowledgement

Supported by : 부경대학교