마이크로파 조사에 의한 SF6 분해시 Al2O3 첨가의 영향

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최성우
Choi, Sung-Woo

  • 투고 : 2012.09.27
  • 심사 : 2013.01.23
  • 발행 : 2013.01.31

초록

Silicon carbide with aluminium oxide was used to remove the sulphur hexafluoride ($SF_6$) gas using microwave irradiation. The destruction and removal efficiencies (DREs) of $SF_6$ were studies as a function of various decomposition temperatures and microwave powers. The decomposition of $SF_6$ gas was analyzed using GC-TCD. XRD (X-ray powder diffraction) and XRF (X-ray Fluorescence Spectrometer) were used to characterize the properties of aluminum oxide. DREs of $SF_6$ were increased as the microwave powers were increased. Additive aluminium oxide on SiC increased the removal efficiencies and decreased the decomposition temperature. The XRD results show that the ${\gamma}-Al_2O_3$ was transformed to ${\alpha}-Al_2O_3$ during $SF_6$ decomposition by microwave irradiation. It was found that the best material to control $SF_6$ was SiC with $Al_2O_3$ 30 wt% in consideration of microwave energy consumption and $SF_6$ decomposition rate.

키워드

$SF_6$;Microwave;SiC;$Al_2O_3$;Decomposition

참고문헌

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과제정보

연구 과제 주관 기관 : 계명대학교