DOI QR코드

DOI QR Code

Particle Size Analysis of Chemical Mechanical Polishing (CMP) Powder Using Sedimentation Field-Flow Fractionation (SdFFF)

침강장-흐름분획법을 이용한 CMP 분말의 입자크기 분석

  • Received : 2012.11.21
  • Accepted : 2012.12.17
  • Published : 2013.02.20

Abstract

Keywords

Chemical Mechanical Polishing (CMP);Size distribution;Sedimentation field-flow fractionation (SdFFF);Transmission Electron Microscopy (TEM);Dynamic Light Scattering (DLS)

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