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A Four-point Bending Probe Station for Semiconductor Sensor Piezoresistance Measurement

반도체센서 압저항 측정을 위한 4점 굽힘 프로브 스테이션

  • Jeon, Ji Won (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Kwon, Sung-Chan (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Park, Woo-Tae (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
  • 전지원 (서울과학기술대학교 기계.자동차공학과) ;
  • 권성찬 (서울과학기술대학교 기계.자동차공학과) ;
  • 박우태 (서울과학기술대학교 기계.자동차공학과)
  • Received : 2013.12.05
  • Accepted : 2013.12.26
  • Published : 2013.12.30

Abstract

A four point bending apparatus has been developed to measure semiconductor sensor piezoresistance inside a four inch probe station. The apparatus has a footprint of $60{\times}83mm^2$ and can apply $10{\mu}m$ displacements using a vertical micrometer stage. We used finite element analysis to predict and improve the accuracy of the instrument. Finally strain gauge attached on a silicon test piece was used to experimentally verify the setup.

Acknowledgement

Supported by : 서울과학기술대학교

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