Expressions for Ellipsometric Constants of Samples Covered with Two Thick Incoherent Films

결맞음길이보다 두꺼운 두 개의 막에 덮여있는 시료의 타원식

  • Received : 2013.01.11
  • Accepted : 2013.03.21
  • Published : 2013.04.25


The expressions for ellipsometric constants of a sample covered with two thick films are derived, where incoherent superposition of multiply reflected lights inside thick films is properly considered in the frame of the rotating analyzer ellipsometry. The derived expressions are successfully applied to the analysis of a silicon wafer with a thin silicon dioxide film on it, which is placed beneath a cover glass and an air gap.


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