A Particulate Matter Sensor with Groove Electrode for Real-Time Diesel Engine On-Board Diagnostics

  • Kim, S. (School of Electrical Engineering, Seoul National University) ;
  • Kim, Y. (School of Electrical Engineering, Seoul National University) ;
  • Lee, J. (Hyundai Motors Company) ;
  • Lim, S. (Hyundai Motors Company) ;
  • Min, K. (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Chun, K. (School of Electrical Engineering, Seoul National University)
  • Received : 2013.04.29
  • Accepted : 2013.05.21
  • Published : 2013.05.31


A particulate matter sensor fabricated by MEMS process is proposed. It is developed to accommodate Euro6 on-board diagnostics regulation for diesel automobile. In the regulation, emission of diesel particulate matter is restricted to 9 mg/km. Particulate matter sensor is designed to use induced charges by charged particulate matter. To increase sensitivity of the sensor, groove is formed on sensor surface because wider surface area generates more induced charges. Sensitivity of the sensor is measured 10.6 mV/(mg/km) and the sensor shows good linearity up to 15.7 mg/km. Also its minimum detectable range is about 0.25 mg/km. It is suitable to detect failure of a diesel particulate filter which should filter particulate matter more than 9 mg/km. For removing accumulated particulate matter on the sensor which can disturb normal operation, platinum heater is designed on the backside of the sensor. The developed sensor can sense very low amount of particulate matter from exhaust gas in real-time with good linearity.


  1. D. W. Dockery et al., "An association between air pollution and mortality in six U. S. Cities", N. Engl. J. Med., Vol. 329, pp. 1753-1759, 1993.
  2. C. A. Pope III et al., "Cardiovascular mortality and long-term exposure to particulate air pollution", Circulation, Vol. 109, pp. 71-77, 2004.
  3. P. H. McMurry, "A review of atmospheric aerosol measurements", Atmos. Environ., Vol. 34, No. 12-14, pp. 1959-1999, 2000.
  4. I. H. Jung et al., "Micromachined electrical mobility analyzer for wide range airborne particle classification", Micro Electro Mechanical Systems 2008, IEEE 21st International Conference, pp. 567-570, 2008.
  5. B. Park et al., "Real-time detection of airborne dust particles using paddle-type silicon cantilevers", J. Vac. Sci. Technol. B, Vol. 27, p. 3120, 2009.
  6. Ochs et al., "Particulate matter sensor for on board diagnostics of diesel particulate filters", Society of Automotive Engineers, 2010-01-0307, 2010.
  7. Rhodes et al., "System for particulate matter sensor signal processing", U. S. Patent NO. 7,765,792, Jan. 13, 2010.
  8. K. Jang et al., "Design of a charge induced type MEMS sensor for particulate matter measurement of on board diagnostics", ICEIC, 2012.
  9. H. Jung et al., "Measurement of electrical charge on diesel particles", Aerosol Sci. Tech., Vol. 39, Issue 12, pp. 1129-1135, 2005.