Shape Error and Its Compensation in the Fabrication of Microlens Array Using Photoresist Thermal Reflow Method

Photoresist thermal reflow 방법을 이용하여 제작한 마이크로렌즈 어레이의 형상 관련 오차 및 이에 대한 보정

  • Kim, Sin Hyeong (Department of Mechanical System Design Engineering, Seoul Natational University of Science & Technology) ;
  • Hong, Seok Kwan (Advanced Convergent R&D group, Korea Institute of Industrial Technology) ;
  • Lee, Kang Hee (School of Robot and Automation Engineering, Dongyang Mirae University) ;
  • Cho, Young Hak (Department of Mechanical System Design Engineering, Seoul Natational University of Science & Technology)
  • 김신형 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 홍석관 (한국생산기술연구원 미래융합연구그룹) ;
  • 이강희 (동양미래대학교 로봇자동화공학부) ;
  • 조영학 (서울과학기술대학교 기계시스템디자인공학과)
  • Received : 2013.03.19
  • Accepted : 2013.04.09
  • Published : 2013.06.30


Microlens array as basic element of the optical system have been fabricated with various focal length (mainly with long focal length) depending on the purpose of application. In this paper, the microlens arrays were fabricated for observing fluorescent images within sol-gel. Though the fluorescent signal is very low, the microlens array can help obtaining clear images through extracting the fluorescent light from sol-gel. We fabricated microlens arrays with short focal length, which can extract the light using photoresist thermal reflow method. In the experiment, the diameter of microlens decreased after thermal reflow because the solvent within the photoresist was vaporized. Therefore, to compensate the shape error by this reduction, microlens diameter in photomask was altered and spin-coat recipe of photoresist were modified.


Supported by : 서울과학기술대학교


  1. S. Mihailov, and S. Lazare, "Fabrication of refractive microlens array by eximer laser ablation of amorphous Teflon," Appl. Opt., 32(31), 6211 (1993).
  2. F.B. McCormick, F.A.P. Tooley, T.J. Cloonan, J.M. Sasian, H.S. Hinton, K.O. Merseau, and A.Y. Feldlum, "Optical interconnections using microlens arrays," Optical and Quantum Electron, 24(4), S465 (1992).
  3. R.H. Anderson, "Close-up imaging of documents and displays with lens arrays," Appl. Opt. 18(4), 477 (1979).
  4. T. Tanaami, S. Otsuki, N. Tomosada, Y. Kosugi, M. Shimizu, and H. Ishida, "High-Speed 1-Frame/ms Scanning Confocal Microscope with a Microlens and Nipkow Disks", Appl. Opt, 41(22), 4704 (2002).
  5. S. Balslev, A.M. Jorgensen, B. Bilenderg, K.B. Mogensen, D. Snakenbord, O. Geschke, J.P. Kutter, and A. Kristensen, "Lab-on-a-chip with integrated optical transducers," Lab Chip, 6, 213 (2006).
  6. S. Generelli, R. Jacquemart, N. de Rooij, M. Jolicoeur, M. Koudelka-Hep, and O.T. Guenat, "Potentiometric platform for the quantification of cellular potassium efflux," Lab Chip, 8, 1210 (2008).
  7. M. Wakaki, Y. Komachi, and G .Kanai, "Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser", Applied Optics, 37(4), 627 (1998).
  8. T. Miyashita, "Standardization for microlenses and microlens arays," Japanese Journal of Applied Physics, 46(8B), 5391 (2007).
  9. D. L. MacFarlane, V. Narayan, W. R. Cox, T. Chen, and D. J. Hayes, "Microjet fabrication of microlens array," IEEE Photonics Technology Letter, 6(6), 1112 (1994).
  10. E. Roy, B. Voisin, J.-F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, "Microlens array fabrication by enhanced thermal reflow process: Towards efficient collection of fluorescence light from microarrays," Microelectronic Engineering, 86, 2255 (2009).

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