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A Consideration on the Process Technology and Application of MEMS to prepare for upcoming MEMS-based technological paradigm

MEMS 기반의 새로운 기술적 패러다임에 대비한 공정 기술 분석 및 적용에 대한 고찰

Ko, Yun-Seok
고윤석

  • Received : 2013.04.20
  • Accepted : 2013.07.23
  • Published : 2013.07.31

Abstract

Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

Keywords

MEMS(Micro Electro Mechanical System);Smart Device;Inertia Sensor;Lap On A Chip