DOI QR코드

DOI QR Code

Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum

  • Hong, S.S. (Korea Research Institute of Standards and Science) ;
  • Shin, Y.H. (Korea Research Institute of Standards and Science) ;
  • Lim, J.Y. (Korea Research Institute of Standards and Science)
  • Received : 2014.05.08
  • Accepted : 2014.05.21
  • Published : 2014.05.30

Abstract

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

Acknowledgement

Supported by : Ministry of Science, ICT and Future Planning

References

  1. K. H. Chung, S. S. Hong, Y. H. Shin, J. Y. Lim, S. K. Lee, and S. Y. Woo, Metrologia 36, 675 (1999). https://doi.org/10.1088/0026-1394/36/6/37
  2. S. S. Hong, K. H. Chung, and M. Hirata, Metrologia 36, 643 (1999). https://doi.org/10.1088/0026-1394/36/6/31
  3. S. S. Hong, Y. H. Shin, K. H. Chung, and K. Jousten, J. Kor. Phys. Soc. 44(6), 1364 (2004).
  4. A. P. Miiller, M. Bergoglio, N. Bignell, K. M. K. Fen, S. S. Hong, K. Jousten, P. Mohan, F. J. Redgrave, and M. Sardi, Metrologia, 39(07001), 1 (2002). https://doi.org/10.1088/0026-1394/39/1/1
  5. D. E. Weaver, J. Vac. Sci. Technol. A4(3), 338 (1986).
  6. J. Y. Lim and K. H. Chung, Vacuum 42(15), 979 (1991). https://doi.org/10.1016/0042-207X(91)90003-2
  7. K. H. Chung and S. S. Hong, IMEKO XIII, Pro XIII IMEKO World Con. (Torino 5-9 Sep., 1994) 3, 1951.
  8. S. S. Hong, I. T. Lim, Y. H. Shin, and K. H. Chung, A. J. Kor. Vac. Soc. 12(1), 151 (2003).
  9. S. S. Hong, Y. H. Shin, K. H. Chung, G. Rumiano, M. Bergoglio, and A. Calcatelli, J. Kor. Vac. Soc. 4(2), 135 (1995).
  10. S. S. Hong, K. H. Chung, and F. J. Redgrave, Metrologia 37, 7 (2000). https://doi.org/10.1088/0026-1394/37/1/2
  11. S. S. Hong, Y. H. Shin, J. Y. Lim, S. K. Lee, K. H. Chung, D. Simpson, F. Redgrave, M. Perkin, B. Waller, M. Hirata, and S. Suginoma, J. Kor. Vac. Soc. 6(4), 308 (1997).
  12. C. R. Tilford, Applied Optics 16(7), 1857 (1977). https://doi.org/10.1364/AO.16.001857
  13. K. Jousten, Vacuum 45, 1205 (1994). https://doi.org/10.1016/0042-207X(94)90082-5
  14. K. W. T. Elliott and P. B. Clapham, NPL Mon. 28, 1 (1978).
  15. S. S. Hong, Y. H. Shin, K. H. Chung, and I. Arakawa, Metrologia 42, 1 (2005). https://doi.org/10.1088/0026-1394/42/1/001
  16. S. S. Hong, Y. H. Shin, and K. H. Chung, J. Kor. Vac. Soc. 5(3), 181 (1996).
  17. P. L. M. Heydemann, C. R. Tilford, and R. W. Hyland, J. Vac. Sci. Technol. 14(1), 587 (1977).
  18. P. L. M. Heydemann, C. R. Tilford, and R. W. Hyland, J. Vac. Sci. Technol. 14(1), 599 (1977).
  19. S. S. Hong, Y. H. Shin, K. H. Chung, I. T. Lim, S. Y. Woo, and S. C. Choi, J. Kor. Vac. Soc. 10(2), 173 (2001).
  20. Guide to the Expression of Uncertainty in Measurement. ISO, 11 (1993).