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Fabrication of Glass Microstructure Using Laser-Induced Backside Wet Etching

레이저 습식 후면 식각공정을 이용한 미세 유리 구조물 제작

  • Kim, Bo Sung (Dept. of Mechanical System Design Eng., Seoul Nat'l Univ. of Science and Technology) ;
  • Park, Min Soo (Dept. of Mechanical System Design Eng., Seoul Nat'l Univ. of Science and Technology)
  • 김보성 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 박민수 (서울과학기술대학교 기계시스템디자인공학과)
  • Received : 2014.04.21
  • Accepted : 2014.07.08
  • Published : 2014.09.01

Abstract

The good light permeability and hardness of glass allow it to be used in various fields. Non-conventional machining methods have been used for glass machining because of its brittle properties. As one non-contact machining method, a laser has advantages that include a high machining speed and the fact that no tool making is required. However, glass has light permeability. Thus, the use of a laser to machine glass has limitations. A nanosecond pulse laser can be used at low power for laser-induced backside wet etching, which is an indirect method. In previous studies, a short-wave laser that had good light absorption but a high price was used. In this study, a near-infrared laser was used to test the possibility of glass micro-machining. In particular, when deeper machining was conducted on a glass structure, more problems could result. To solve these problems, microstructure manufacturing was conducted using ultrasonic vibration.

Keywords

Laser Machining;LIBWE;Glass Micro Structure;Ultrasonic Vibration

Acknowledgement

Supported by : 한국연구재단

References

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