하이브리드 공정으로 제조한 TiAlSiN 박막의 특성

DOI QR코드

DOI QR Code

송민아;양지훈;정재훈;김성환;정재인
Song, Min-A;Yang, Ji-Hoon;Jung, Jae-Hun;Kim, Sung-Hwan;Jeong, Jae-In

  • 투고 : 2014.08.05
  • 심사 : 2014.08.25
  • 발행 : 2014.08.30

초록

In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbide substrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAl and Si target were vaporized with the cathodic arc source and the magnetron sputtering source, respectively. Process gas was the mixture of nitrogen and argon gas. With the increase of Si content, the crystallinity and the grain size of TiAlSiN film was decreased. At the Si content of more than 8 at.%, grain size of TiAlSiN was saturated at around 2 nm. The hardness value of the TiAlSiN film increased with incorporation of Si, and had the maximum value of ~ 3,233 Hv at the Si content of 9.2 at.%. The oxidation resistance of TiAlSiN film was enhanced with the increase of Si content.

키워드

Magnetron Sputtering;Cathodic Arc Deposition;TiAlSiN Coating;Hybrid Process;Oxidation Resistance

참고문헌

  1. C. C. Koch, D. G. Morris, K. Lu, A. Inoue, MRS Bul., 24 (1999) 146.
  2. A. A. Voevodin, J. S. Zabinski, Thin Solid Films, 370 (2000) 223. https://doi.org/10.1016/S0040-6090(00)00917-2
  3. K. H. Kim, S. R. Choi, S. Y. Yoon, Surf. Coat. Technol., 298 (2002) 243.
  4. S. Veprek, J. Vac. Sic. Technol. A, 17 (1999) 2401. https://doi.org/10.1116/1.581977
  5. J. Musil, Surf. Coat. Technol., 125 (2000) 322. https://doi.org/10.1016/S0257-8972(99)00586-1
  6. E. Lugscheider, C. Barimani, C. Wolff, S. Guerreiro, G. Doepper, Surf. Coat. Technol., 86-87 (1996) 177. https://doi.org/10.1016/S0257-8972(96)03041-1
  7. J. H. Jung, J. H. Yang, H. S. Park, M. A Song, J. I. Jeong, J. Kor. Inst. Surf. Eng., 45 (2012) 104.
  8. D. Yu, C. Wang, X. Cheng, F. Zhang, Appl. Surf. Sci., 255 (2008) 1865. https://doi.org/10.1016/j.apsusc.2008.06.204
  9. I. W. Park, S. R. Choi, J. H. Suh, C. G. Park, K. H. Kim, Thin Solid Films, 447-448 (2004) 443. https://doi.org/10.1016/S0040-6090(03)01122-2
  10. J. S. Kim, G. J. Kim, M. C. Kang, J. W. Kim, K. H. Kim, Surf. Coat. Technol., 193 (2005) 249. https://doi.org/10.1016/j.surfcoat.2004.07.019
  11. D. Philippon, V. Godinho, P.M. Nagy, M.P. Delplancke-Ogletree, A. Fernandez, Wear, 270 (2011) 541. https://doi.org/10.1016/j.wear.2011.01.009
  12. S. Y. Yoon, S. R. Choi, M. H. Lee, K. H. Kim, J. Kor. Inst. Surf. Eng., 36 (2003) 122.
  13. F. Lang, Z. Yu, Surf. Coat. Technol., 145 (2001) 80. https://doi.org/10.1016/S0257-8972(01)01284-1
  14. P. J. Martin, A. Bendavid, J.M. Cairney, M. Hoffman, Surf. Coat. Technol., 200 (2005) 2228. https://doi.org/10.1016/j.surfcoat.2004.06.012
  15. Th. H. De Keijser, J. I. Langford, E. J. Melterneijer, A. B. P. Vogels, J. Appl. Cryst., 15 (1982) 308. https://doi.org/10.1107/S0021889882012035
  16. Y. Y. Chang, S. M. Yang, Thin Solid Films, 518 (2010) S34. https://doi.org/10.1016/j.tsf.2010.03.020

피인용 문헌

  1. 1. Properties of AlTiN Films Deposited by Cathodic Arc Deposition vol.49, pp.3, 2016, doi:10.5695/JKISE.2014.47.4.174

과제정보

연구 과제 주관 기관 : 산업통상자원부